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@chepec /LEO1550
Last active Aug 29, 2015

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Function extracts all tags from a scanning electron microscopy (SEM) TIFF image created using Zeiss EM software. Two example text files with extracted TIFF tags from SEM micrographs recorded on LEO1550 and Merlin SEM, respectively.
TIFF Directory at offset 0x8 (8)
Subfile Type: (0 = 0x0)
Image Width: 1024 Image Length: 768
Resolution: 1, 1 (unitless)
Bits/Sample: 8
Compression Scheme: None
Photometric Interpretation: palette color (RGB from colormap)
Samples/Pixel: 1
Rows/Strip: (infinite)
Planar Configuration: single image plane
Color Map: (present)
Tag 34118: 0
0
0
3.593750e-008
1.000507e+004
6
5.000000e+003
2.370000e+000
2.000000e-007
4.084405e-003
1
3.593750e-008
1.000507e+004
6
5.000000e+003
2.370000e+000
2.000000e-007
4.084405e-003
2
3.593750e-008
1.000507e+004
6
5.000000e+003
2.370000e+000
2.000000e-007
4.084405e-003
3
3.593750e-008
1.000507e+004
6
5.000000e+003
2.370000e+000
2.000000e-007
4.084405e-003
293
DP_NEWFILAMENT
New Filament = No
DP_ZOOM
Zoom = Off
DP_APERTURE
Aperture No. = 1
DP_DYNFOCUS
Dyn.Focus = Off
DP_BEAM_BLANKED
Beam Blanked = No
DP_STAGE_IS
Stage Is = Idle
DP_STAGE_INIT
Stage Initialised = Yes
DP_OUT_DEV
Output dev = 19/21 inch display
DP_PIXEL_SIZE
Pix Size state = calibrated
DP_EHT_VAC_READY
EHT Vac ready = Yes
DP_LINE_SCAN
Line Scan = Off
DP_SPOT
Spot = Off
DP_WINDOWING
Windowing = Off
DP_VENT_INHIBITED
Venting inhibited = Yes
DP_4QBSD_GAIN
BSD Gain = High
DP_4QBSD_VISIBLE
BSD Fast = No
DP_4QBSD_Q4
Q4 = Normal
DP_4QBSD_Q3
Q3 = Normal
DP_4QBSD_Q2
Q2 = Normal
DP_4QBSD_Q1
Q1 = Normal
DP_AUTO_VIDEO
Auto BC = Off
DP_INVERT
Invert A = Off
DP_MIXING
Mixing = Off
DP_DETECTOR_CHANNEL
Signal A = InLens
DP_ZONE
Zone = 0
DP_IMAGE_STORE
Store resolution = 1024 * 768
DP_STAGE_TILTED
Stage Tilt = In Y
DP_Z1
Zone 1 = Live
DP_Z0
Zone 0 = Live
DP_FREEZE_STATUS
Freeze = Idle
DP_FREEZE_ON
Freeze on = End Frame
DP_CHANNEL
Display = 0
DP_RIGHT_FROZEN
Right Frozen = No
DP_TILTED
Stage Tilted = No
DP_VENT_INVALID_REASON
Vent inhibit = Beam Present
DP_SCINT
Scint. = On
DP_SCAN_ROT
Scan Rot = Off
DP_TILT_CORRECTION
Tilt Corrn. = Off
DP_IMPLIED_INVERT
Invert B = Off
DP_IMPLIED_DETECTOR
Signal B = InLens
DP_MAIN_DETECTOR
Control = Signal A
DP_COLUMN_ISOLATED
Column Isolated = No
DP_SCM_RANGE
SCM range = 3->10 pA
DP_EXT_SCAN_CONTROL
Ext.Scan Control = Off
DP_ALL_ZONES
All Zones = Off
DP_MAG_RANGE
Mag Range = 2
DP_LOW_MAG
Low Mag = Off
DP_FROZEN
Image = Live
DP_LUT_MODE
Display LUT mode = Normal
DP_FREEZE_BLANKS
Freeze Blanks = Yes
DP_IMAGE_DETECT
Image Detect = Black
DP_CROSSHAIRS
Crosshairs = Off
DP_TRACK_Z
Track Z = On
DP_SEM
Sem = 1550
DP_USER_MAG_CAL
User Calibration = Off
DP_INPUT_LUT_MODE
Input LUT Mode = Transparent
DP_DWELL_TIME
Dwell Time = 100 ns
DP_USER
User = Idle
DP_SCM_STATUS
SCM Status = Off
DP_USE_REF_MAG
Reference Mag = Out Dev.
DP_BSD_AUTO
BSD Auto Range = On
DP_ELECTRON_COUNTING
Electron Counting = Off
DP_HIGH_CURRENT
High Current = Off
DP_DUAL_MONITOR
Dual Monitor = Off
DP_MAINS_SYNC
Mains Sync = Single Edge
DP_FAST_MODE
Fast Mode = Off
DP_PELTIER
Peltier = Off
DP_IMAGE_SAVED
Image saved = No
DP_STEM_AUTO
STEM Auto = Off
DP_STEM_GAIN
STEM Gain = Low
DP_STEM_FAST
STEM Fast = No
DP_STEM_Q3
STEM Q3 = Off
DP_STEM_Q2
STEM Q2 = Off
DP_STEM_Q1
STEM Q1 = Off
DP_LARGE_BEAMSHIFT
Large Beam Shift = Off
DP_USER_LEVEL
User Level = Expert
DP_QUATTRO_BANDWIDTH
BSD Bandwidth = DC
DP_USER_ALIGN
User Align = On
DP_COLOUR_MODE
Colour Mode = Off
DP_RECIPE
Recipe = Idle
DP_SI_NOISE_REDUCTION
SmartImage Noise Reduction = Off
DP_BSD_FAST_SCAN
BSD Fast Scan = Off
DP_SCD_BANDWIDTH
SCD Bandwidth = DC
DP_SCD_AUTO
SCD Auto Range = Off
DP_SCD_GAIN
SCD Gain = Low
DP_OPTIPROBE
OptiProbe = Off
DP_4QBSD_Q5
Q5 = Off
DP_CC_ON_GIS_CHANNEL
GIS Channel with CC = None
DP_RUNUPSTATE
Beam State = Beam On
DP_OPERATING_MODE
Operating Mode = Normal
DP_SCANRATE
Scan Speed = 10
DP_STEM_SEG_MODE
STEM Seg. Mode = Off
DP_VACSTATUS
Vac Status = Ready
DP_COLUMN_PUMPING
Column pumping = Ready
DP_NOISE_REDUCTION
Noise Reduction = Pixel Avg.
DP_LEFT_FROZEN
All Frozen = No
DP_CC_STATUS
CC Status = Off
DP_OUT_TYPE
Output To = Display/File
AP_C3
C3 Lens I = 960.19 mA
AP_SCANROTATION
Scan Rotation = 311.5 °
AP_WD
WD = 4.1 mm
AP_MAG
Mag = 10.00 K X
AP_BRIGHTNESS
Brightness = 49.0 %
AP_MANUALKV
EHT Target = 5.00 kV
AP_IPROBE
I Probe = 200.0 nA
AP_FRAME_TIME
Cycle Time = 48.7 Secs
AP_TILT_ANGLE
Tilt Angle = 0.0 °
AP_TILT_AXIS
Tilt Axis = 0.0 °
AP_STIG_X
Stigmation X = 0.2 %
AP_APERTURESIZE
Aperture Size = 30.00 µm
AP_BEAMSHIFT_Y
Beam Shift Y = 0.1 %
AP_BEAMSHIFT_X
Beam Shift X = 0.1 %
AP_RED_RASTER_H
Red.Raster Height = 256
AP_RED_RASTER_W
Red.Raster Width = 256
AP_RED_RASTER_POSN_Y
Red.Raster Posn Y = 256
AP_RED_RASTER_POSN_X
Red.Raster Posn X = 384
AP_ZOOM_FACTOR
Zoom factor = 2.000
AP_STIG_Y
Stigmation Y = 0.0 %
AP_PPB_3
Pb 4 = 0.0 °
AP_PPB_2
Pb 3 = 0.0 °
AP_PPB_1
Pb 2 = 0.0 °
AP_PPB_0
Pb 1 = 45.0 °
AP_PPA_3
Pa 4 = 0.00 nm
AP_PPA_2
Pa 3 = 0.00 nm
AP_PPA_1
Pa 2 = 0.00 nm
AP_PPA_0
Pa 1 = 6.506 µm
AP_RADIAL_3
Da 4 = 0.00 nm
AP_RADIAL_2
Da 3 = 0.00 nm
AP_RADIAL_1
Da 2 = 0.00 nm
AP_RADIAL_0
Da 1 = 1.438 µm
AP_ANGULAR_1
Aa 2 = 0.0 °
AP_ANGULAR_0
Aa 1 = 63.4 °
AP_STAGE_FIELDS_Y
Stage fields Y = 1
AP_STAGE_FIELDS_X
Stage fields X = 1
AP_STAGE_GOTO_Z
Stage goto Z = 26.912 mm
AP_STAGE_GOTO_Y
Stage goto Y = 50.374 mm
AP_STAGE_GOTO_X
Stage goto X = 41.211 mm
AP_PROFILE_W
Profile width = 71.79 µm
AP_PIXEL_SIZE
Pixel Size = 35.94 nm
AP_COLUMN_VAC
Gun Vacuum = 1.76e-009 mbar
AP_SYSTEM_VAC
System Vacuum = 2.38e-006 mbar
AP_STAGE_LOW_Z
Stage low Z = 0.000 mm
AP_STAGE_LOW_Y
Stage low Y = 0.000 mm
AP_STAGE_LOW_X
Stage low X = 0.000 mm
AP_STAGE_HIGH_Z
Stage high Z = 35.000 mm
AP_STAGE_HIGH_Y
Stage high Y = 100.000 mm
AP_STAGE_HIGH_X
Stage high X = 125.000 mm
AP_STAGE_AT_FIELD_Y
Stage at field Y = 1
AP_STAGE_AT_FIELD_X
Stage at field X = 1
AP_STAGE_GOTO_FIELD_Y
Stage goto field Y = 1
AP_STAGE_GOTO_FIELD_X
Stage goto field X = 1
AP_STAGE_FIELD_SIZE_Y
Stage field size Y = 0.000 mm
AP_STAGE_FIELD_SIZE_X
Stage field size X = 0.000 mm
AP_CONTRAST
Contrast = 32.4 %
AP_OFFSET
Offset A = 0.0 %
AP_GAIN
Gain A = 100.0 %
AP_GAMMA
Gamma = 1.000
AP_LINE_INT_COUNT
Line int. count = 1
AP_FRAME_INT_COUNT
Frames to Int. = 0
AP_FRAME_AVERAGE_COUNT
Frames to average = 1
AP_K2
Mix Signal = 0.0000
AP_K1
Signal = 1.000
AP_SCM
Specimen I = 0 fA
AP_MAG1
Mag Z1 = 1.000
AP_MAG0
Mag Z0 = 1.000
AP_COLLECTOR_BIAS
Collector Bias = 300 V
AP_IMPLIED_OFFSET
Offset B = 0.0 %
AP_IMPLIED_GAIN
Gain B = 100.0 %
AP_FILAMENT_AGE
Filament Age = 1378.29 Hours
AP_BEAM_OFFSET_Y
Beam Offset Y = 13.89 nm
AP_BEAM_OFFSET_X
Beam Offset X = 9.13 nm
AP_HEIGHT
Height = 27.60 µm
AP_WIDTH
Width = 36.80 µm
AP_ALIAS_WD
Focus = 4.1 mm
AP_MINMAG
Min Mag = 88 X
AP_NR_COEFF
N = 1
AP_LINE_AVERAGE_COUNT
Line Avg.Count = 3
AP_PHOTO_NUMBER
Photo No. = 9068
AP_FIELD_OVERLAP
Field Overlap = 0.0 %
AP_MIN_WD
Focus scan min = 1 mm
AP_MAX_WD
Focus scan max = 40 mm
AP_AREA_FRACTION
Area Fraction = 0.0 %
AP_WHITE_DETECT
White Threshold = 100.0 %
AP_BLACK_DETECT
Black Threshold = 0.0 %
AP_STAGE_GOTO_T
Stage goto T = 0.0 °
AP_STAGE_GOTO_R
Stage goto R = 135.7 °
AP_BEAM_TIME
Beam Time = 6730.12 Hours
AP_HCSTAGE_TEMP
Peltier Temp = 20.0 °C
AP_EXTCURRENT
Extractor I = 124.70 µA
AP_MANUALEXT
Extractor V Target = 6.40 kV
AP_APERTURE_ALIGN_Y
Aperture Align Y = -1.4 %
AP_APERTURE_ALIGN_X
Aperture Align X = -4.7 %
AP_STAGE_GOTO_M
Stage goto M = 0.000 mm
AP_CURSOR_HEIGHT
Cursor Height = 6.901 µm
AP_CURSOR_WIDTH
Cursor Width = 14.52 µm
AP_PPA_5
Pa 6 = 0.00 nm
AP_PPA_4
Pa 5 = 0.00 nm
AP_PROFILE_W2
Profile Width 2 = 0.00 nm
AP_PROFILE_W1
Profile Width 1 = 0.00 nm
AP_H_5
H 6 = 0.00 nm
AP_H_4
H 5 = 0.00 nm
AP_H_3
H 4 = 0.00 nm
AP_H_2
H 3 = 0.00 nm
AP_H_1
H 2 = 0.00 nm
AP_H_0
H 1 = 0.00 nm
AP_PPB_6
Pb 7 = 0.0 °
AP_PPB_5
Pb 6 = 0.0 °
AP_PPB_4
Pb 5 = 0.0 °
AP_PPA_9
Pa 10 = 0.00 nm
AP_PPA_8
Pa 9 = 0.00 nm
AP_PPA_7
Pa 8 = 0.00 nm
AP_PPA_6
Pa 7 = 0.00 nm
AP_FCF_SETTING
FCF Setting = -10.5 %
AP_V_9
V 10 = 0.00 nm
AP_V_8
V 9 = 0.00 nm
AP_V_7
V 8 = 0.00 nm
AP_V_6
V 7 = 0.00 nm
AP_V_5
V 6 = 0.00 nm
AP_V_4
V 5 = 0.00 nm
AP_V_3
V 4 = 0.00 nm
AP_V_2
V 3 = 0.00 nm
AP_V_1
V 2 = 0.00 nm
AP_V_0
V 1 = 0.00 nm
AP_H_9
H 10 = 0.00 nm
AP_H_8
H 9 = 0.00 nm
AP_H_7
H 8 = 0.00 nm
AP_H_6
H 7 = 0.00 nm
AP_STAGE_DELTA_M
Stage Delta M = 0.000 mm
AP_STAGE_DELTA_R
Stage Delta R = 0.0 °
AP_STAGE_DELTA_T
Stage Delta T = 0.0 °
AP_STAGE_DELTA_Z
Stage Delta Z = 0.000 mm
AP_STAGE_DELTA_Y
Stage Delta Y = 0.000 mm
AP_STAGE_DELTA_X
Stage Delta X = 0.000 mm
AP_SPACER_THICKNESS
Spacer Thickness = 0.000 mm
AP_SAMPLE_HEIGHT
Compu. Height = 29.828 mm
AP_IMAGE_PIXEL_SIZE
Image Pixel Size = 35.94 nm
AP_RADIAL_AREA_1
Db 2 = 0. nm²
AP_RADIAL_AREA_0
Db 1 = 1.623 µm²
AP_USER_MAX_EHT
User Max EHT = 30.00 kV
AP_PROF2_X2
Profile 2 X2 = 0
AP_PROF2_X1
Profile 2 X1 = 0
AP_PROF1_X2
Profile 1 X2 = 0
AP_PROF1_X1
Profile 1 X1 = 0
AP_CCD_ILLUMINATION
CCD Illum. = 85.0 %
AP_RADIAL_AREA_3
Db 4 = 0. nm²
AP_RADIAL_AREA_2
Db 3 = 0. nm²
AP_PRINT_NUMBER
Print No. = 0
AP_FILE_NUMBER
File No = 8650
AP_SPECIMEN_HEIGHT
Specimen Height = 0 mm
AP_ESD_EXCITATION
ESD Excitation = 0.0 %
AP_STAGE_LOW_R
Stage low R = -380.0 °
AP_STAGE_HIGH_R
Stage high R = 380.0 °
AP_FRAME_COUNTER
Frame Counter = 12942
AP_PELTIER_TARGET
Peltier Target = 20.0 °C
AP_SEM_LEVEL_AT_TILT
SEM Level @ = 0.0 °
AP_DC_MAX_ATTEMPTS
Drift Max Tries = 10
AP_DC_MIN_CONF
Drift Min Conf = 50.0 %
AP_DC_MAX_PIX_ERROR
Drift Max.Pix.Error = 1
AP_ESB_GRID
ESB Grid = 100 V
AP_VAC_READY_AT
Vac Ready @ = 2.00e-005 mbar
AP_DEFECT_ID
Defect ID = 0
AP_HOLDER_HEIGHT
Holder Height = 16.200 mm
AP_HOLDER_LENGTH
Holder Length = 20.000 mm
AP_HOLDER_WIDTH
Holder Width = 20.000 mm
AP_HOLDER_DIAMETER
Holder Diameter = 50.000 mm
AP_SI_FACTOR
SmartImage Sharpening = 0.0 %
AP_SI_THRESHOLD
SmartImage Threshold = 0.0 %
AP_SI_ENHANCEMENT
SmartImage Contrast = 0.0 %
AP_LASER_FINDER_ILLUM
Laser Illumination = 0.0 %
AP_ESB_GRID_IS
ESB Grid is = 0 V
AP_SI_TOPOGRAPHY
SmartImage Topography = 0.0 %
AP_SPECIMEN_DIAMETER
Specimen Diameter = 0 mm
AP_CC_PRESSURE
CC Pressure = 0.0 %
AP_STAGE_AT_Z
Stage at Z = 25.857 mm
AP_STAGE_AT_Y
Stage at Y = 49.0478 mm
AP_STAGE_AT_X
Stage at X = 50.0762 mm
AP_SAMPLE_AT_Y
Sample at Y = 0.0000
AP_SAMPLE_AT_X
Sample at X = 0.0000
AP_STAGE_AT_T
Stage at T = -0.1 °
AP_STAGE_AT_R
Stage at R = 142.1 °
AP_ACTUALCURRENT
Fil I = 2.370 A
AP_ACTUALKV
EHT = 5.00 kV
AP_STAGE_AT_M
Stage at M = 0.000 mm
SV_VERSION
Version = V05.04.05.00 : 02-Sep-10
TIFF Directory at offset 0x8 (8)
Subfile Type: (0 = 0x0)
Image Width: 1024 Image Length: 768
Resolution: 1, 1 (unitless)
Bits/Sample: 8
Compression Scheme: None
Photometric Interpretation: palette color (RGB from colormap)
Samples/Pixel: 1
Rows/Strip: (infinite)
Planar Configuration: single image plane
Color Map: (present)
Tag 34118: 0
0
0
7.300143e-009
4.014530e+004
6
3.000000e+003
2.328000e+000
1.000000e-010
2.705767e-003
1
7.300143e-009
4.014530e+004
6
3.000000e+003
2.328000e+000
1.000000e-010
2.705941e-003
2
7.300143e-009
4.014530e+004
6
3.000000e+003
2.328000e+000
1.000000e-010
2.705941e-003
3
7.300143e-009
4.014530e+004
6
3.000000e+003
2.328000e+000
1.000000e-010
2.705941e-003
648
DP_EHTCOMMSFAIL
EHT Comms Fail = No
DP_NEWFILAMENT
New Filament = No
DP_ANODE
Anode Spacer = High KV
DP_FILAMENT_TYPE
Filament Type = FE FEI
DP_OPTIMODE
OptiBeam Mode = Resolution
DP_OPTIRESMODE
OptiBeam Res Mode = manual
DP_OPTIBEAM
OptiBeam Is = Off
DP_STIGBALANCE
Stig Balance = Off
DP_ZOOM
Zoom = Off
DP_APERTURE_STATE
Aperture = Clean
DP_OPT_APERTURE
Opt.Aperture = 2
DP_APERTURE
Aperture No. = 1
DP_DYNFOCUS
Dyn.Focus = Off
DP_BEAM_BLANKED
Beam Blanked = No
DP_STAGE_IS
Stage Is = Idle
DP_STAGE_INIT
Stage Initialised = Yes
DP_OUT_DEV
Output dev = 19/21 inch display
DP_MAG_CAL
Mag State = calibrated
DP_PIXEL_SIZE
Pix Size state = calibrated
DP_EHT_VAC_READY
EHT Vac ready = Yes
DP_EHT_RESET
EHT spurious reset = No
DP_EHT_TRIPPED
EHT tripped = No
DP_FIL_BLOWN
Filament blown = No
DP_DISPLAY_CHANNELS
Channels = 1
DP_LINE_SCAN
Line Scan = Off
DP_SPOT
Spot = Off
DP_WINDOWING
Windowing = Off
DP_VENT_INHIBITED
Venting inhibited = Yes
DP_GATE_VALVE
WDX Gate valve = Closed
DP_4QBSD
BSD = Present
DP_4QBSD_GAIN
BSD Gain = High
DP_4QBSD_VISIBLE
BSD Fast = No
DP_4QBSD_Q4
Q4 = Normal
DP_4QBSD_Q3
Q3 = Normal
DP_4QBSD_Q2
Q2 = Normal
DP_4QBSD_Q1
Q1 = Normal
DP_GATE_VALVE_POSITION
WDX Gate Valve posn = OK
DP_AUTO_VIDEO
Auto BC = Off
DP_INVERT
Invert A = Off
DP_MIXING
Mixing = Off
DP_DETECTOR_TYPE
Detector = InLens
DP_DETECTOR_CHANNEL
Signal A = InLens
DP_ZONE
Zone = 0
DP_IMAGE_STORE
Store resolution = 1024 * 768
DP_STAGE_TILTED
Stage Tilt = in X
DP_Z1
Zone 1 = Live
DP_Z0
Zone 0 = Live
DP_FREEZE_STATUS
Freeze = Idle
DP_FREEZE_ON
Freeze on = End Frame
DP_CHANNEL
Display = 0
DP_RIGHT_FROZEN
Right Frozen = No
DP_COLUMN_TYPE
Column = Merlin
DP_TILTED
Stage Tilted = No
DP_VENT_INVALID_REASON
Vent inhibit = Beam Present
DP_SCINT
Scint. = On
DP_SCAN_ORTHOG
Scan Orthog = On
DP_SCAN_ROT
Scan Rot = Off
DP_TILT_CORRECTION
Tilt Corrn. = Off
DP_IMPLIED_INVERT
Invert B = Off
DP_IMPLIED_DETECTOR
Signal B = HE-SE2
DP_MAIN_DETECTOR
Control = Signal A
DP_BEST_APERTURE
Best Aperture = Yes
DP_COLUMN_ISOLATED
Column Isolated = No
DP_C3_ROT_SIGN
C3 Rotn Sign = +
DP_SCM_RANGE
SCM range = 3->10 pA
DP_CALIBRATION
Calibration = Disabled
DP_EXT_SCAN_CONTROL
Ext.Scan Control = Off
DP_ALL_ZONES
All Zones = Off
DP_MAG_RANGE
Mag Range = 3
DP_STAGE_ANGLE
Stage Angle corrn. = On
DP_C3_ROT_CORRECTION
C3 Rot Corrn. = On
DP_LOW_MAG
Low Mag = Off
DP_MONITOR
Monitor = 19/21 inch
DP_CONJUGATE
OptiBeam conjugate = Off
DP_COLUMN_MODE
Column Mode = Crossover
DP_FROZEN
Image = Live
DP_LUT_MODE
Display LUT mode = Normal
DP_SATURATE_AT
Saturate at = Second peak
DP_FREEZE_BLANKS
Freeze Blanks = Yes
DP_OUTPUT_REDUCTION
Output Reduction = 1
DP_IMAGE_DETECT
Image Detect = Black
DP_EXTRACTOR_TRIP
Extractor Trip = No
DP_EBBU_MODE
Beam Blanker Mode = Blanked
DP_CROSSHAIRS
Crosshairs = Off
DP_FIXED_APERTURE
VP Aperture = No
DP_TRACK_Z
Track Z = On
DP_SEM
Sem = Merlin
DP_SUPERVISOR
Supervisor = Disabled
DP_USER_MAG_CAL
User Calibration = Off
DP_CONDENSER
Condenser Normal = Normal
DP_INPUT_LUT_MODE
Input LUT Mode = Transparent
DP_SCANGEN
Scan Gen = Present
DP_DWELL_TIME
Dwell Time = 50 ns
DP_USER
User = Idle
DP_SCM_STATUS
SCM Status = Valid
DP_PARTIAL_VENT
Partial Vent on Standby = Yes
DP_COMPUCENTRIC_MODE
Compuc. Mode = Off
DP_WATER_OK
Water OK = Yes
DP_USE_REF_MAG
Reference Mag = Out Dev.
DP_SAMPLE_HOLDER
Sample Holder = Carousel 9x9mm
DP_VPSE
VPSE detector = Absent
DP_SCANGEN_TYPE
ScanGen Type = SVSEM
DP_FRAME_GRABBER
Frame Grabber = SVSEM
DP_BSD_AUTO
BSD Auto Range = On
DP_ELECTRON_COUNTING
Electron Counting = Off
DP_FIB_PRESENT
FIB Present = No
DP_HIGH_CURRENT
High Current = Off
DP_FLOOD_STATE
Flood State = Idle
DP_HUMIDITY_VALVE
Humidity Valve = Closed
DP_DUAL_MONITOR
Dual Monitor = Off
DP_FIXED_APERTURE2
EP Aperture = None fitted
DP_MAINS_SYNC
Mains Sync = Single Edge
DP_FIB_MILL_PROBE
FIB Milling Probe = Undefined
DP_FIB_IMAGE_PROBE
FIB Image Probe = Undefined
DP_FIB_PROBE
FIB Probe = Undefined
DP_FIB_BLANKED
FIB Blanked = No
DP_FIB_MODE
FIB Mode = Imaging
DP_FAST_MODE
Fast Mode = Off
DP_CONDENSER_REVERSED
Condenser Reversed = No
DP_PELTIER
Peltier = Off
DP_FINAL_LENS
Final Lens = 1500: Gemini
DP_CLS_VALVE
C.L.S.Valve = Closed
DP_FIB_SUPPRESSOR
FIB Suppressor is = Absent
DP_DC_SEM_STATE
Sem drift status = Not Available
DP_IMAGE_SAVED
Image saved = Yes
DP_FIB_GUN_VALVE
FIB Gun Valve = Closed
DP_FIB_LOCK_MAG
FIB Lock Mags = No
DP_FIB_SCAN
FIB Scan = Continuous
DP_EP_MODE
EP Gas = Air
DP_STEM_AUTO
STEM Auto = Off
DP_STEM_GAIN
STEM Gain = Low
DP_STEM_FAST
STEM Fast = No
DP_STEM_Q3
STEM Q3 = Off
DP_STEM_Q2
STEM Q2 = Off
DP_STEM_Q1
STEM Q1 = Off
DP_FIELD_MODE
Field Mode = Off
DP_END_DETECTION
End Detection = Off
DP_USE_EPD
Use End Point Detection = No
DP_FIB_EXTRACTOR_CONFLICT
FIB Extractor Conflict = No
DP_LARGE_BEAMSHIFT
Large Beam Shift = Off
DP_USER_LEVEL
User Level = Expert
DP_FISHEYE_MODE
Fisheye Mode = Off
DP_SAFE_STEM_VALID
Safe STEM Valid = Yes
DP_QUATTRO_BANDWIDTH
BSD Bandwidth = DC
DP_FISHEYE_FITTED
Fish-Eye Fitted = Yes
DP_USER_ALIGN
User Align = Off
DP_SIGNALAZ1
Signal A Z1 = InLens
DP_SIGNALAZ0
Signal A Z0 = InLens
DP_CUSTOM_HOLDER
Custom Holder = No
DP_GIS_CHANNEL
GIS Channel = None
DP_EPSE_ELECTRODE
EPSE Electrode = Ring
DP_COLOUR_MODE
Colour Mode = Off
DP_RECIPE
Recipe = Idle
DP_SI_NOISE_REDUCTION
SmartImage Noise Reduction = Off
DP_FIB_TRACK_WD
FIB Tracking WD = Off
DP_SI_SOURCE
SI source-hidden = 0
DP_BSD_FAST_SCAN
BSD Fast Scan = Off
DP_PELTIER_PHOTO
Peltier Photo = Off
DP_COOLSTAGE_TYPE
CoolStage Type = Cold
DP_SCD_BANDWIDTH
SCD Bandwidth = DC
DP_SCD_AUTO
SCD Auto Range = On
DP_SCD_GAIN
SCD Gain = Low
DP_FIB_MAG_RANGE
FIB Mag Range = 0
DP_EPSE_BANDWIDTH
EPSE Bandwidth = DC
DP_EPSE_AUTO
EPSE Auto Range = Off
DP_EPSE_GAIN
EPSE Gain = Low
DP_FIB_ERROR
FIB Error = None
DP_IGP_ENABLED
IGP Enabled = Yes
DP_OPTIPROBE
OptiProbe = Off
DP_FIB_WIDE_VIEW
FIB Wide View = Off
DP_FIB_COLUMN
FIB Column = None
DP_AR_GUN
Argon Gun = Absent
DP_ION_DETECTOR_MODE
SESI Mode = SE
DP_AR_MILL
Argon Mill = Off
DP_VPSE2
VPSE-G3 Fitted = Absent
DP_4QBSD_Q5
Q5 = Off
DP_JAZZ_GAIN
Jazz Gain = Low
DP_PELTIER_TYPE
Peltier Type = Deben
DP_AR_MFCVALVE
Argon MFC Valve = Closed
DP_JAZZ_BANDWIDTH
Jazz Bandwidth = Low
DP_AR_SCAN
Argon Scan = Off
DP_CC_TYPE
CC Type = Stand Alone
DP_BAKEOUT_FULL
full service bakeout = Yes
DP_CC_ON_GIS_CHANNEL
GIS Channel with CC = None
DP_STAGE_BIAS
Stage Bias = On
DP_STAGE_COMMS_FAIL
Stage comms fail = No
DP_VAC_COMMS_FAIL
Vac comms fail = No
DP_BSD_MODE
BSD Mode = Compo
DP_VP_OPTIBEAM
VP Optibeam = Off
DP_HESE2_FITTED
HE-SE2 Fitted = Yes
DP_MGS_EVAC_STATE
MGS Evacuation State = Off
DP_GIS_SHUTDOWN_STATE
GIS Shutdown State = Normal
DP_INLENS_DUO_MODE
InlensDuo Mode = SE
DP_BSD_N_ON_P
N on P Diode = No
DP_GIS_HEATING_STATUS_1
GIS Heating Status Channel 1 = GIS Not Heating
DP_STEM_Q5
STEM Q5 = Off
DP_STEM_Q4
STEM Q4 = Off
DP_OPTIBEAM_STATE
OptiBeam = Off
DP_RUNUPSTATE
Beam State = Beam On
DP_OPERATING_MODE
Operating Mode = Normal
DP_C3REVERSAL
C3 Reversal = Normal
DP_SCANRATE
Scan Speed = Max
DP_CALMODE
Cal Mode = Off
DP_STEM_SEG_MODE
STEM Seg. Mode = Off
DP_VACSTATUS
Vac Status = Ready
DP_COLUMN_CHAMBER_VALVE
Column Chamber valve = Open
DP_COLUMN_PUMPING
Column pumping = Ready
DP_NOISE_REDUCTION
Noise Reduction = Frame Avg
DP_LEFT_FROZEN
All Frozen = No
DP_CC_STATUS
CC Status = Off
DP_AR_GUN_STATE
Argon Gun is = Off
DP_OUT_TYPE
Output To = Display/File
DP_VAC_MODE
Vacuum Mode = High Vacuum
DP_FIB_IMAGING
FIB Imaging = SEM
DP_FIB_GUN_STATE
FIB Gun State = Off
AP_C3
C3 Lens I = 911.58 mA
AP_C2
C2 Lens I = 675.73 mA
AP_C1
C1 Lens I = 653.07 mA
AP_STAGEANGLE
Stage Angle = -133.5 \B0
AP_SCANORTHOG
Scan Orth corrn = 1.3 \B0
AP_SCANROTATION
Scan Rotation = 301.0 \B0
AP_WD
WD = 2.7 mm
AP_MAG
Mag = 40.15 K X
AP_MAG_COMP_AMPL
Mag Comp. Amplitude = 100.0 %
AP_BRIGHTNESS
Brightness = 50.1 %
AP_MANUALCURRENT
Fil I Target = 2.330 A
AP_MANUALKV
EHT Target = 3.00 kV
AP_USERMAXCURRENT
Fil I (Usermax) = 4.000 A
AP_IPROBE
I Probe = 100 pA
AP_EMISSIONZOOM
Emission Zoom = 100
AP_FRAME_TIME
Cycle Time = 2.2 Secs
AP_LINE_TIME
Line Time = 55 \B5s
AP_FCF_TILT
FCF Tilt Angle = 0.0 \B0
AP_TILT_ANGLE
Tilt Angle = 0.0 \B0
AP_TILT_AXIS
Tilt Axis = 90.0 \B0
AP_C3REM
C3 Rem = 0.0137
AP_C3CAL
C3 Cal = 1.038
AP_C2REM
C2 Rem = 0.0318
AP_C2CAL
C2 Cal = 0.9880
AP_C1REM
C1 Rem = 0.0105
AP_C1CAL
C1 Cal = 0.9917
AP_MAG_COMP_OFFSET
Mag Comp. Offset = 3470
AP_STIG_X
Stigmation X = -0.9 %
AP_APERTUREPOSN_Y
Aperture Posn Y = 1.000 mm
AP_APERTUREPOSN_X
Aperture Posn X = 5.000 mm
AP_APERTURESIZE
Aperture Size = 30.00 \B5m
AP_ZOOMPOS_Y
Zoom Posn Y = 192
AP_ZOOMPOS_X
Zoom Posn X = 128
AP_BEAMSHIFT_Y
Beam Shift Y = 0.0 %
AP_BEAMSHIFT_X
Beam Shift X = 0.0 %
AP_GUNTILT_Y
Gun Tilt Y = 0.0 %
AP_GUNTILT_X
Gun Tilt X = 0.0 %
AP_GUNSHIFT_Y
Gun Shift Y = 0.0 %
AP_GUNSHIFT_X
Gun Shift X = 0.0 %
AP_MAGCALHEIGHT
Mag Cal Actual Height = 0.00 nm
AP_MAGCALWIDTH
Mag Cal Actual Width = 0.00 nm
AP_RED_RASTER_H
Red.Raster Height = 540
AP_RED_RASTER_W
Red.Raster Width = 800
AP_RED_RASTER_POSN_Y
Red.Raster Posn Y = 127
AP_RED_RASTER_POSN_X
Red.Raster Posn X = 200
AP_FOCUS_ROTATION_COMP
Focus Rotation comp. = -0.009 kV
AP_DUAL_MAG_OFFSET_Y
Dual Mag Offset Y = 1.300
AP_DUAL_MAG_OFFSET_X
Dual Mag Offset X = 0.6000
AP_SPOT_POSN_Y
Spot at Y = 192
AP_SPOT_POSN_X
Spot at X = 256
AP_ZOOM_FACTOR
Zoom factor = 2.000
AP_STIG_Y
Stigmation Y = 2.1 %
AP_PPB_3
Pb 4 = 0.0 \B0
AP_PPB_2
Pb 3 = 0.0 \B0
AP_PPB_1
Pb 2 = 0.0 \B0
AP_PPB_0
Pb 1 = 0.0 \B0
AP_PPA_3
Pa 4 = 0.00 nm
AP_PPA_2
Pa 3 = 0.00 nm
AP_PPA_1
Pa 2 = 0.00 nm
AP_PPA_0
Pa 1 = 0.00 nm
AP_RADIAL_3
Da 4 = 0.00 nm
AP_RADIAL_2
Da 3 = 0.00 nm
AP_RADIAL_1
Da 2 = 0.00 nm
AP_RADIAL_0
Da 1 = 0.00 nm
AP_ANGULAR_3
Aa 4 = 0.000 kV
AP_ANGULAR_2
Aa 3 = 0.000 kV
AP_ANGULAR_1
Aa 2 = 0.0 \B0
AP_ANGULAR_0
Aa 1 = 0.0 \B0
AP_STAGE_FIELDS_Y
Stage fields Y = 1
AP_STAGE_FIELDS_X
Stage fields X = 1
AP_STAGE_SCAN_ANGLE
Stage scan angle = 0.0 \B0
AP_STAGE_VECTOR_Z
Stage vector Z = 0.0 %
AP_STAGE_VECTOR_Y
Stage vector Y = 0.0 %
AP_STAGE_VECTOR_X
Stage vector X = 0.0 %
AP_STAGE_GOTO_Z
Stage goto Z = 26.489 mm
AP_STAGE_GOTO_Y
Stage goto Y = 0.006 mm
AP_STAGE_GOTO_X
Stage goto X = 62.551 mm
AP_PROFILE_W
Profile width = 0.00 nm
AP_EHT_SET_MAX
EHT set maximum = 30.00 kV
AP_BEAM_CURRENT
Beam Current = 80.0 \B5A
AP_PIXEL_SIZE
Pixel Size = 7.300 nm
AP_COLUMN_VAC
Gun Vacuum = 9.85e-010 mbar
AP_SYSTEM_VAC
System Vacuum = 9.50e-007 mbar
AP_STAGE_LOW_Z
Stage low Z = 0.000 mm
AP_STAGE_LOW_Y
Stage low Y = 0.000 mm
AP_STAGE_LOW_X
Stage low X = 0.000 mm
AP_STAGE_HIGH_Z
Stage high Z = 50.000 mm
AP_STAGE_HIGH_Y
Stage high Y = 130.000 mm
AP_STAGE_HIGH_X
Stage high X = 130.000 mm
AP_STAGE_AT_FIELD_Y
Stage at field Y = 1
AP_STAGE_AT_FIELD_X
Stage at field X = 1
AP_STAGE_GOTO_FIELD_Y
Stage goto field Y = 1
AP_STAGE_GOTO_FIELD_X
Stage goto field X = 1
AP_STAGE_FIELD_SIZE_Y
Stage field size Y = 0.000 mm
AP_STAGE_FIELD_SIZE_X
Stage field size X = 0.000 mm
AP_CONTRAST
Contrast = 32.2 %
AP_OFFSET
Offset A = 0.0 %
AP_GAIN
Gain A = 100.0 %
AP_GAMMA
Gamma = 1.000
AP_LINE_INT_COUNT
Line int. count = 1
AP_FRAME_INT_COUNT
Frames to Int. = 0
AP_FRAME_AVERAGE_COUNT
Frames to average = 33
AP_K2
Mix Signal = 0.0000
AP_K1
Signal = 1.000
AP_SCM
Specimen I = 10.4 pA
AP_MAG1
Mag Z1 = 1.000
AP_MAG0
Mag Z0 = 1.000
AP_COLLECTOR_BIAS
Collector Bias = 300 V
AP_AUTO_CONTRAST
Auto C Target = 50.0 %
AP_AUTO_BRIGHT
Auto B Target = 50.0 %
AP_FRAME_AMPL
Frame Ampl Cal. = 0
AP_IMPLIED_OFFSET
Offset B = 0.0 %
AP_IMPLIED_GAIN
Gain B = 100.0 %
AP_FILAMENT_AGE
Filament Age = 8555.23 Hours
AP_BEAM_OFFSET_Y
Beam Offset Y = 0.00 nm
AP_BEAM_OFFSET_X
Beam Offset X = 0.00 nm
AP_HEIGHT
Height = 5.607 \B5m
AP_WIDTH
Width = 7.475 \B5m
AP_CONJUGATE
Conjugate posn. = -164.00 mm
AP_DUAL_MAG_Y_SLOPE
Dual Mag Gain Y = 300.00
AP_ALIAS_WD
Focus = 2.7 mm
AP_DUAL_MAG_SLOPE
Dual Mag Gain X = 201.00
AP_MINMAG
Min Mag = 87 X
AP_SPOTSIZE
Spot Size = 1
AP_NR_COEFF
N = 33
AP_LINE_AVERAGE_COUNT
Line Avg.Count = 2
AP_PHOTO_NUMBER
Photo No. = 2520
AP_SCAN_OFFSET_Y
Scan Y cal. = 0
AP_SCAN_OFFSET_X
Scan X cal. = 0
AP_FIELD_OVERLAP
Field Overlap = 0.0 %
AP_XTALK21
Xtalk21 = 0.0000
AP_XTALK12
Xtalk12 = 0.0000
AP_MIN_WD
Focus scan min = 1 mm
AP_MAX_WD
Focus scan max = 40 mm
AP_AREA_FRACTION
Area Fraction = 0.0 %
AP_WHITE_DETECT
White Threshold = 100.0 %
AP_BLACK_DETECT
Black Threshold = 0.0 %
AP_EHT_SET_MIN
EHT Set minimum = 0.010 kV
AP_MAG_SHIFT_Y
Mag Shift Cal Y = 0.0000
AP_MAG_SHIFT_X
Mag Shift Cal X = 0.0000
AP_STAGE_VECTOR_T
Stage vector T = 0.0 %
AP_STAGE_VECTOR_R
Stage vector R = 0.0 %
AP_STAGE_GOTO_T
Stage goto T = 0.0 \B0
AP_STAGE_GOTO_R
Stage goto R = 14.8 \B0
AP_BEAM_TIME
Beam Time = 533.16 Hours
AP_SPOT
Spot signal = 0
AP_ACTUALEXT
Extractor V = 4.11 kV
AP_HCSTAGE_TEMP
Peltier Temp = 20.0 \B0C
AP_STAGE_LOW_T
Stage low T = -4.0 \B0
AP_STAGE_HIGH_T
Stage high T = 70.0 \B0
AP_NOMINALFIL
Nominal Fil I = 2.330 A
AP_NOMINALEXT
Nominal extractor V = 4.11 kV
AP_EXTCURRENT
Ext I Monitor = 172.8 \B5A
AP_ACTUALLENS
Liner Tube = 8.00 kV
AP_ACTUALSUPP
Suppressor V = 300 V
AP_MANUALEXT
Extractor V Target = 4.11 kV
AP_TEST_VAL
Test Val = 0.0000
AP_TEST_N
Test No. = 0
AP_GUN_Y
Gun at Y = 0.0 %
AP_GUN_X
Gun at X = 0.0 %
AP_APERTURE_Y
Aperture at Y = 0.0 %
AP_APERTURE_X
Aperture at X = 0.0 %
AP_APERTURE_ALIGN_Y
Aperture Align Y = 10.6 %
AP_APERTURE_ALIGN_X
Aperture Align X = 11.9 %
AP_GUNALIGN_Y
Gun Align Y = 0.0 %
AP_GUNALIGN_X
Gun Align X = 0.0 %
AP_CHAMBER_PRESSURE
Chamber = 9.50e-005 Pa
AP_HP_TARGET
VP Target = 10 Pa
AP_STAGE_GOTO_M
Stage goto M = 0.000 mm
AP_MAX_EXTRACTOR_V
Max Extractor V = 6.00 kV
AP_EHT_CAL_30KV
EHT Cal@30KV = 30.00 kV
AP_EHT_CAL_24KV
EHT Cal@24KV = 24.00 kV
AP_EHT_CAL_10KV
EHT Cal@10KV = 10.00 kV
AP_EHT_CAL_100
EHT Cal@0.1KV = 100 V
AP_CURSOR_HEIGHT
Cursor Height = 0.00 nm
AP_CURSOR_WIDTH
Cursor Width = 0.00 nm
AP_PROFILE_TOP
Profile Top = 300
AP_MIN_EXT
Min Extractor V = 3.00 kV
AP_MANUALLENS
Liner Target = 8.00 kV
AP_MANUALSUPP
Suppressor V Target = 300 V
AP_PPA_5
Pa 6 = 0.00 nm
AP_PPA_4
Pa 5 = 0.00 nm
AP_PROFILE_W2
Profile Width 2 = 0.00 nm
AP_PROFILE_W1
Profile Width 1 = 0.00 nm
AP_MAG_GAIN_Y
Mag Gain Cal Y = 1000.00
AP_MAG_GAIN_X
Mag Gain Cal X = 1000.00
AP_STAGE_VECTOR_M
Stage Vector M = 0.0 %
AP_STAGE_HIGH_M
Stage high M = 0.000 mm
AP_STAGE_LOW_M
Stage low M = 0.000 mm
AP_H_5
H 6 = 0.00 nm
AP_H_4
H 5 = 0.00 nm
AP_H_3
H 4 = 0.00 nm
AP_H_2
H 3 = 0.00 nm
AP_H_1
H 2 = 0.00 nm
AP_H_0
H 1 = 0.00 nm
AP_PPB_6
Pb 7 = 0.0 \B0
AP_PPB_5
Pb 6 = 0.0 \B0
AP_PPB_4
Pb 5 = 0.0 \B0
AP_PPA_9
Pa 10 = 0.00 nm
AP_PPA_8
Pa 9 = 0.00 nm
AP_PPA_7
Pa 8 = 0.00 nm
AP_PPA_6
Pa 7 = 0.00 nm
AP_WATER_TEMP
EO Temp = 0.0 \B0C
AP_FCF_SETTING
FCF Setting = 0.0 %
AP_V_9
V 10 = 0.00 nm
AP_V_8
V 9 = 0.00 nm
AP_V_7
V 8 = 0.00 nm
AP_V_6
V 7 = 0.00 nm
AP_V_5
V 6 = 0.00 nm
AP_V_4
V 5 = 0.00 nm
AP_V_3
V 4 = 0.00 nm
AP_V_2
V 3 = 0.00 nm
AP_V_1
V 2 = 0.00 nm
AP_V_0
V 1 = 0.00 nm
AP_H_9
H 10 = 0.00 nm
AP_H_8
H 9 = 0.00 nm
AP_H_7
H 8 = 0.00 nm
AP_H_6
H 7 = 0.00 nm
AP_STAGE_DELTA_M
Stage Delta M = 0.000 mm
AP_STAGE_DELTA_R
Stage Delta R = 0.0 \B0
AP_STAGE_DELTA_T
Stage Delta T = 0.0 \B0
AP_STAGE_DELTA_Z
Stage Delta Z = 0.000 mm
AP_STAGE_DELTA_Y
Stage Delta Y = 0.000 mm
AP_STAGE_DELTA_X
Stage Delta X = 0.000 mm
AP_SPACER_THICKNESS
Spacer Thickness = 0.000 mm
AP_STAGE_CENTRE_Y
Stage Centre Y = 64.762 mm
AP_STAGE_CENTRE_X
Stage Centre X = 63.557 mm
AP_SAMPLE_HEIGHT
Compu. Height = 0.000 mm
AP_WATER_TEMP_LIMIT
EO Temp Limit = 35.0 \B0C
AP_IMAGE_PIXEL_SIZE
Image Pixel Size = 7.300 nm
AP_RADIAL_AREA_1
Db 2 = 0. nm\B2
AP_RADIAL_AREA_0
Db 1 = 0. nm\B2
AP_USER_MAX_EHT
User Max EHT = 30.00 kV
AP_PROF2_X2
Profile 2 X2 = 0
AP_PROF2_X1
Profile 2 X1 = 0
AP_PROF1_X2
Profile 1 X2 = 0
AP_PROF1_X1
Profile 1 X1 = 0
AP_SEMIANGLE
Semi Angle = 0.00 \B5rad
AP_SPOT_X_CAL
Spot X Cal = 0
AP_CCD_ILLUMINATION
CCD Illum. = 88.0 %
AP_RADIAL_AREA_3
Db 4 = 0. nm\B2
AP_RADIAL_AREA_2
Db 3 = 0. nm\B2
AP_VP_LIMIT
VP LaB6 Limit = 275 Pa
AP_HRRU_NUMBER
HRRU No. = 0
AP_PRINT_NUMBER
Print No. = 0
AP_FILE_NUMBER
File No = 2434
AP_SPECIMEN_HEIGHT
Specimen Height = 0 mm
AP_COMPU_TILT_ERROR
Compu. Tilt Error = 0.0000
AP_FIB_EHT_ACTUAL
FIB EHT = 0.000 kV
AP_FIB_EHT_TARGET
FIB EHT Target = 0.000 kV
AP_ESD_EXCITATION
ESD Excitation = 0.0 %
AP_ESD_LOWER_Y
ESD Lower Y = 0.0 %
AP_ESD_LOWER_X
ESD Lower X = 0.0 %
AP_ESD_UPPER_Y
ESD Upper Y = 0.0 %
AP_ESD_UPPER_X
ESD Upper X = 0.0 %
AP_STAGE_LOW_R
Stage low R = -380.0 \B0
AP_STAGE_HIGH_R
Stage high R = 380.0 \B0
AP_STIG_CAL_Y
Stig. Cal Y = 0.0 %
AP_STIG_CAL_X
Stig. Cal X = 0.0 %
AP_OPT_SEMIANGLE
Opt. Semi Angle = 0.00 \B5rad
AP_FIB_CONDENSER
FIB Condenser = 0 V
AP_FIB_EXT_ACTUAL
FIB Extractor = 0.000 kV
AP_FIB_EXT_TARGET
FIB Extr.Target = 0.000 kV
AP_FIB_APERTURE_ALIGN_Y
FIB Aper.Align Y = 0.0000
AP_FIB_APERTURE_ALIGN_X
FIB Aper.Align X = 0.0000
AP_FIB_SCAN_ROTATION
FIB Scan Rot = 0.0 \B0
AP_FIB_BEAM_SHIFT_Y
FIB Beam Shift Y = 0.00 nm
AP_FIB_BEAM_SHIFT_X
FIB Beam Shift X = 0.00 nm
AP_FIB_STIGMATOR_Y
FIB Stig Y = 0.0 %
AP_FIB_STIGMATOR_X
FIB Stig X = 0.0 %
AP_FIB_MAGNIFICATION
FIB Mag = 0 X
AP_FIB_OBJECTIVE_POTENTIAL
FIB Objective = 0 V
AP_FIB_FIL_V_TARGET
FIB Fil V target = 0.0 V
AP_FIB_FIL_I_TARGET
FIB Fil I Target = 0 \B5A
AP_FIB_FIL_V
FIB Fil Voltage = 0.0 V
AP_FIB_FIL_I
FIB Fil Current = 0 \B5A
AP_FRAME_COUNTER
Frame Counter = 575940
AP_FIB_EMISSION_CURRENT
FIB Emission I = 0.0 \B5A
AP_FIB_SUPPRESSOR_TARGET
FIB Suppressor Target = 0 V
AP_FIB_SHIFT_CORRECTION_X
FIB Shift Correction X = 0.00 nm
AP_HUMIDITY_TARGET
Humidity Target = 0.0 %
AP_HUMIDITY
Humidity = 0.0 %
AP_PELTIER_TARGET
Peltier Target = 20.0 \B0C
AP_FREE_WD
Free WD = 2.7 mm
AP_FIB_STIG_Y_CENTRE_Y
FIB Stig Y Centre Y = 0.0000
AP_FIB_STIG_Y_CENTRE_X
FIB Stig Y Centre X = 0.0000
AP_FIB_DRIFT_Y
FIB Drift Y = 0.00 nm
AP_FIB_DRIFT_X
FIB Drift X = 0.00 nm
AP_FIB_STIG_X_CENTRE_Y
FIB Stig X Centre Y = 0.0000
AP_FIB_STIG_X_CENTRE_X
FIB Stig X Centre X = 0.0000
AP_FIB_EMISSION_TARGET
FIB Emission Target = 0.0 \B5A
AP_FIB_SUPPRESSOR
FIB Suppressor = 0 V
AP_PURGE_MIN
Purge Min = 133 Pa
AP_PURGE_MAX
Purge Max = 1066 Pa
AP_PURGE_CYCLES
Purge cycles = 2
AP_FIB_SEM_ANGLE
FIB SEM Angle = 54.0 \B0
AP_SEM_LEVEL_AT_TILT
SEM Level @ = 0.0 \B0
AP_DC_MAX_ATTEMPTS
Drift Max Tries = 10
AP_DC_MIN_CONF
Drift Min Conf = 50.0 %
AP_DC_MAX_PIX_ERROR
Drift Max.Pix.Error = 1
AP_EP_TARGET
EP Target = 10 Pa
AP_FIB_SHIFT_CORRECTION_Y
FIB Shift Correction Y = 0.00 nm
AP_FIB_FOCUS
FIB Focus = 0.0
AP_HSYNC_DELAY
HSync delay = 0 ns
AP_PIEZO_AT_Y
Piezo at Y = 0.000 \B5m
AP_PIEZO_AT_X
Piezo at X = 0.000 \B5m
AP_ESB_GRID_MAX
ESB Grid Max = 1500 V
AP_ESB_GRID
ESB Grid = 1490 V
AP_FM_QUADRITURE
Field Mode Quadriture = 1000
AP_FM_ORTHOG
Field Mode Orthog = -1.0 \B0
AP_FM_ANGLE
Field Mode Angle = -1.0 \B0
AP_FIB_HEATING_LIMIT
FIB Heating Limit = 0 \B5A
AP_EPD_LOW
EPD Low Limit = 0
AP_EPD_HIGH
EPD High Limit = 0
AP_VAC_READY_AT
Vac Ready @ = 5.00e-005 mbar
AP_FIB_TILT_COMP
FIB Tilt Comp = 0.0 \B0
AP_MILL_LIST_ELAPSED_TIME
Mill List Elapsed Time = 0 ms
AP_MILL_LIST_TOTAL_TIME
Mill List Total Time = 0 ms
AP_FIB_PIXEL_SIZE
FIB Pixel Size = 0.0 fm
AP_LINE_COUNTER
Line Counter = 0
AP_FIB_SLICE_ANGLE
Slice Angle = 0.0 \B0
AP_FIB_SLICE_HEIGHT
Slice Height = 0.00 nm
AP_FIB_SLICE_WIDTH
Slice Width = 0.00 nm
AP_FIB_SLICE_Y
Slice Y = 0.00 nm
AP_FIB_SLICE_X
Slice X = 0.00 nm
AP_FIB_SLICE_INDEX
Slice Index = 0
AP_FISHEYE_QUADRITURE
Fisheye quadriture = 1000
AP_FISHEYE_ORTHOG
Fisheye Orthog = 180.0 \B0
AP_FISHEYE_ANGLE
Fisheye Angle = 96.0 \B0
AP_CONTRASTZ1
Contrast B = 32.2 %
AP_CONTRASTZ0
Contrast A = 32.2 %
AP_BRIGHTNESSZ1
Brightness B = 50.1 %
AP_BRIGHTNESSZ0
Brightness A = 50.1 %
AP_DEFECT_ID
Defect ID = 0
AP_FIB_GUN_PRESSURE
FIB Gun Pressure = 0.00e+000 mbar
AP_STAGE_XM_ANGLE
Stage X+M Angle = 8.0 \B0
AP_MILL_ITEM_ELAPSED_TIME
Mill Item Elapsed Time = 0 ms
AP_MILL_ITEM_TOTAL_TIME
Mill Item Total Time = 0 ms
AP_FIB_MIN_AUTOHEAT_CURRENT
FIB Min. Autoheat Current = 0 \B5A
AP_STAGE_XM_R
Stage X+M Rotation = 0.0 \B0
AP_FIB_NUDGE_STEP
FIB Nudge Step = 0.00 nm
AP_HOLDER_HEIGHT
Holder Height = 16.200 mm
AP_HOLDER_LENGTH
Holder Length = 0.000 mm
AP_HOLDER_WIDTH
Holder Width = 0.000 mm
AP_HOLDER_DIAMETER
Holder Diameter = 50.000 mm
AP_SI_FACTOR
SmartImage Sharpening = 0.0 %
AP_SI_THRESHOLD
SmartImage Threshold = 0.0 %
AP_SI_ENHANCEMENT
SmartImage Contrast = 0.0 %
AP_COMPU_TILT_OFFSET
Compu. Tilt Offset = 0.000 mm
AP_LASER_FINDER_ILLUM
Laser Illumination = 0.0 %
AP_FIB_CONDENSER_ACTUAL
FIB Condenser actual = 0 V
AP_VPSE2_BIAS
VPSE G3 Bias = 60.0 %
AP_EPSE_BIAS
EPSE Bias = 0.0 %
AP_ESB_GRID_IS
ESB Grid is = 1490 V
AP_LINER_CAL_AT_10KV
Liner Cal @ 10KV = 10000 V
AP_LINER_CAL_AT_100V
Liner cal @ 100V = 100 V
AP_SI_TOPOGRAPHY
SmartImage Topography = 0.0 %
AP_PIEZO_EXCHANGE_Y
Piezo Exchange Y = 0.000 \B5m
AP_PIEZO_EXCHANGE_X
Piezo Exchange X = 0.000 \B5m
AP_SPECIMEN_DIAMETER
Specimen Diameter = 10 mm
AP_FIB_TRACK_WD_DELTA
FIB Track WD Delta = 0.00 nm
AP_ION_CONVERTOR_VOLTAGE
Convertor Voltage = 0.000 kV
AP_ION_COLLECTOR_VOLTAGE
Collector Voltage = 0.000 kV
AP_FIB_SOURCE_LIFETIME
FIB Source Lifetime = 0.00 \B5Ah
AP_FIB_PROBE_CURRENT_ACTUAL
FIB Probe Current Actual = 0.0 pA
AP_FIB_OBJECTIVE_ACTUAL
FIB Objective Actual = 0 V
AP_AR_V_INT_ACTUAL
Argon V Int is = 0 V
AP_AR_V_INT
Argon V Int = 0 V
AP_AR_GAS_FLOW_ACTUAL
Argon Gas Flow is = 0.0 %
AP_AR_GAS_FLOW
Argon Gas Flow = 0.0 %
AP_AR_OBJECTIVE_ACTUAL
Argon Objective is = 0 V
AP_AR_OBJECTIVE
Argon Objective = 0 V
AP_AR_CONDENSER_ACTUAL
Argon Condenser is = 0 V
AP_AR_CONDENSER
Argon Condenser = 0 V
AP_AR_DISCHARGE_CURRENT
Argon Discharge I is = 0.0 \B5A
AP_AR_DISCHARGE_ACTUAL
Argon Discharge is = 0 V
AP_AR_DISCHARGE
Argon Discharge = 0 V
AP_AR_ACC_ACTUAL
Argon Energy is = 0 V
AP_AR_ACC
Argon Energy = 0 V
AP_AR_MAG
Argon Magnification = 0 X
AP_AR_BEAM_SHIFT_Y
Argon Beam Shift Y = 0.00 nm
AP_AR_BEAM_SHIFT_X
Argon Beam Shift X = 0.00 nm
AP_AR_SHIFT_RATIO_Y
Argon Shift Ratio Y = 0.0000
AP_AR_SHIFT_RATIO_X
Argon Shift Ratio X = 0.0000
AP_AR_XY_RATIO
Argon XY Ratio = 0.0000
AP_AR_MAG_FACTOR
Argon Mag Factor = 0.00 nm
AP_AR_PIXEL_SIZE
Argon Pixel Size = 0.0 fm
AP_AR_ANGLE
Argon Column Angle = 0.0 \B0
AP_AR_ACC_I
Argon Acc I is = 0.0 \B5A
AP_AR_EXTRACTOR_ACTUAL
Argon Extractor is = 0 V
AP_AR_EXTRACTOR
Argon Extractor = 0 V
AP_AR_MILL_PROGRESS
Argon Mill Progress = 0.0 %
AP_ALIGN1_Y
Align 1 Y = 0.1 %
AP_ALIGN1_X
Align 1 X = -10.1 %
AP_CC_PRESSURE
CC Pressure = 0.0 %
AP_PIRANI_PRESSURE
Pirani Pressure = 0.00e+000 mbar
AP_JAZZ_BACK_GRID
Back Grid = 0 V
AP_JAZZ_FRONT_GRID
Front Grid = 0 V
AP_BEAM_CURRENT_MONITOR
Beam I Monitor = 10.9 \B5A
AP_STAGE_BIAS_VOLTAGE
Stage Bias Volts = 0.0 V
AP_POLARIS_PROBE_CAL
Probe Cal Factor = 1.000
AP_FIB_SCAN_SIZE
FIB Scan Size = 0.00 nm
AP_FIB_ABS_DELTA_BEAM_SHIFT_Y
FIB Abs Beam Shift Y = 0.00 nm
AP_FIB_ABS_DELTA_BEAM_SHIFT_X
FIB Abs Beam Shift X = 0.00 nm
AP_PIEZO_GOTO_Y
Piezo Goto Y = 0.000 \B5m
AP_PIEZO_GOTO_X
Piezo Goto X = 0.000 \B5m
AP_INLENS_DUO_GRID_ACTUAL
InlensDuo Grid is = 0 V
AP_INLENS_DUO_GRID
InlensDuo Grid = 0 V
AP_CONTRASTZ3
Contrast D = 32.2 %
AP_CONTRASTZ2
Contrast C = 32.2 %
AP_BRIGHTNESSZ3
Brightness D = 50.1 %
AP_BRIGHTNESSZ2
Brightness C = 50.1 %
AP_FIB_COLUMN_PRESSURE
FIB Column Pressure = 0.00e+000 mbar
AP_STAGE_AT_Z
Stage at Z = 48.079 mm
AP_STAGE_AT_Y
Stage at Y = 51.3685 mm
AP_STAGE_AT_X
Stage at X = 79.1914 mm
AP_SAMPLE_AT_Y
Sample at Y = 0.0000
AP_SAMPLE_AT_X
Sample at X = 0.0000
AP_STAGE_AT_T
Stage at T = 0.0 \B0
AP_STAGE_AT_R
Stage at R = 14.8 \B0
AP_ACTUALCURRENT
Fil I = 2.328 A
AP_ACTUALKV
EHT = 3.00 kV
AP_STAGE_AT_M
Stage at M = 0.000 mm
SV_VERSION
Version = V05.06.00.00 : 10-Dec-12
##################################################
################ tifftags2df #####################
##################################################
tiffalltags2df <- function(tifftagsfile) {
## Description:
## Extracts all tags from a TIFF image file
## using the tiffinfo tool and stores
## all tags in a dataframe.
## This function is an improvement of the tifftags2df() function
## This function can handle both LEO1500 and Merlin TIFF tag files,
## and uses a better method for dealing with unit identification
## Usage:
## tiffalltags2df(pathtotifftagsfile)
## Arguments:
## tifftags: path to tifftags file
## Value:
## A dataframe with the following columns:
## sampleid
## parameter
## string
## value
## unit
#
sampleid <- strsplit(basename(tifftagsfile), "\\.")[[1]][1]
# fix sampleid for some older samples without proper date part
# if the sampleid begins with something other than at least 3 numbers,
# then prepend the date (get it from the parent directory name in the path)
if (length(grep("^[0-9]{3}", x = sampleid)) == 0) {
sampleid <-
paste(sub("-.*$", "", basename(dirname(tifftagsfile))),
sampleid, sep = "-")
}
# Strip non-ASCII characters and trailing spaces from the TIFF tags
tifftags <-
sub("\\s+$", "", iconv(readLines(tifftagsfile), to = "ASCII", sub = ""))
# These are the tags we are looking for
tags.df <-
data.frame(stringsAsFactors = FALSE,
sampleid,
matrix(#
# parameter.name # parameter.regexp # splitchar # unit.regexp
c("EHT Comms Fail", "DP\\_EHTCOMMSFAIL", " = ", "",
"New Filament", "DP\\_NEWFILAMENT", " = ", "",
"Anode Spacer", "DP\\_ANODE", " = ", "",
"Filament Type", "DP\\_FILAMENT\\_TYPE", " = ", "",
"OptiBeam Mode", "DP\\_OPTIMODE", " = ", "",
"OptiBeam Res Mode", "DP\\_OPTIRESMODE", " = ", "",
"OptiBeam Is", "DP\\_OPTIBEAM", " = ", "",
"Stig Balance", "DP\\_STIGBALANCE", " = ", "",
"Zoom", "DP\\_ZOOM", " = ", "",
"Aperture", "DP\\_APERTURE\\_STATE", " = ", "",
"Opt.Aperture", "DP\\_OPT\\_APERTURE", " = ", "",
"Aperture No.", "DP\\_APERTURE", " = ", "",
"Dyn.Focus", "DP\\_DYNFOCUS", " = ", "",
"Beam Blanked", "DP\\_BEAM\\_BLANKED", " = ", "",
"Stage Is", "DP\\_STAGE\\_IS", " = ", "",
"Stage Initialised", "DP\\_STAGE\\_INIT", " = ", "",
"Output dev", "DP\\_OUT\\_DEV", " = ", "",
"Mag State", "DP\\_MAG\\_CAL", " = ", "",
"Pix Size state", "DP\\_PIXEL\\_SIZE", " = ", "",
"EHT Vac ready", "DP\\_EHT\\_VAC\\_READY", " = ", "",
"EHT spurious reset", "DP\\_EHT\\_RESET", " = ", "",
"EHT tripped", "DP\\_EHT\\_TRIPPED", " = ", "",
"Filament blown", "DP\\_FIL\\_BLOWN", " = ", "",
"Channels", "DP\\_DISPLAY\\_CHANNELS", " = ", "",
"Line Scan", "DP\\_LINE\\_SCAN", " = ", "",
"Spot", "DP\\_SPOT", " = ", "",
"Windowing", "DP\\_WINDOWING", " = ", "",
"Venting inhibited", "DP\\_VENT\\_INHIBITED", " = ", "",
"WDX Gate valve", "DP\\_GATE\\_VALVE", " = ", "",
"BSD", "DP\\_4QBSD", " = ", "",
"BSD Gain", "DP\\_4QBSD\\_GAIN", " = ", "",
"BSD Fast", "DP\\_4QBSD\\_VISIBLE", " = ", "",
"Q4", "DP\\_4QBSD\\_Q4", " = ", "",
"Q3", "DP\\_4QBSD\\_Q3", " = ", "",
"Q2", "DP\\_4QBSD\\_Q2", " = ", "",
"Q1", "DP\\_4QBSD\\_Q1", " = ", "",
"WDX Gate Valve posn", "DP\\_GATE\\_VALVE\\_POSITION", " = ", "",
"Auto BC", "DP\\_AUTO\\_VIDEO", " = ", "",
"Invert A", "DP\\_INVERT", " = ", "",
"Mixing", "DP\\_MIXING", " = ", "",
"Detector", "DP\\_DETECTOR\\_TYPE", " = ", "",
"Signal A", "DP\\_DETECTOR\\_CHANNEL", " = ", "",
"Zone", "DP\\_ZONE", " = ", "",
"Store resolution", "DP\\_IMAGE\\_STORE", " = ", "",
"Stage Tilt", "DP\\_STAGE\\_TILTED", " = ", "",
"Zone 1", "DP\\_Z1", " = ", "",
"Zone 0", "DP\\_Z0", " = ", "",
"Freeze", "DP\\_FREEZE\\_STATUS", " = ", "",
"Freeze on", "DP\\_FREEZE\\_ON", " = ", "",
"Display", "DP\\_CHANNEL", " = ", "",
"Right Frozen", "DP\\_RIGHT\\_FROZEN", " = ", "",
"Column", "DP\\_COLUMN\\_TYPE", " = ", "",
"Stage Tilted", "DP\\_TILTED", " = ", "",
"Vent inhibit", "DP\\_VENT\\_INVALID\\_REASON", " = ", "",
"Scint.", "DP\\_SCINT", " = ", "",
"Scan Orthog", "DP\\_SCAN\\_ORTHOG", " = ", "",
"Scan Rot", "DP\\_SCAN\\_ROT", " = ", "",
"Tilt Corrn.", "DP\\_TILT\\_CORRECTION", " = ", "",
"Invert B", "DP\\_IMPLIED\\_INVERT", " = ", "",
"Signal B", "DP\\_IMPLIED\\_DETECTOR", " = ", "",
"Control", "DP\\_MAIN\\_DETECTOR", " = ", "",
"Best Aperture", "DP\\_BEST\\_APERTURE", " = ", "",
"Column Isolated", "DP\\_COLUMN\\_ISOLATED", " = ", "",
"C3 Rotn Sign", "DP\\_C3\\_ROT\\_SIGN", " = ", "",
"SCM range", "DP\\_SCM\\_RANGE", " = ", "",
"Calibration", "DP\\_CALIBRATION", " = ", "",
"Ext.Scan Control", "DP\\_EXT\\_SCAN\\_CONTROL", " = ", "",
"All Zones", "DP\\_ALL\\_ZONES", " = ", "",
"Mag Range", "DP\\_MAG\\_RANGE", " = ", "",
"Stage Angle corrn.", "DP\\_STAGE\\_ANGLE", " = ", "",
"C3 Rot Corrn.", "DP\\_C3\\_ROT\\_CORRECTION", " = ", "",
"Low Mag", "DP\\_LOW\\_MAG", " = ", "",
"Monitor", "DP\\_MONITOR", " = ", "",
"OptiBeam conjugate", "DP\\_CONJUGATE", " = ", "",
"Column Mode", "DP\\_COLUMN\\_MODE", " = ", "",
"Image", "DP\\_FROZEN", " = ", "",
"Display LUT mode", "DP\\_LUT\\_MODE", " = ", "",
"Saturate at", "DP\\_SATURATE\\_AT", " = ", "",
"Freeze Blanks", "DP\\_FREEZE\\_BLANKS", " = ", "",
"Output Reduction", "DP\\_OUTPUT\\_REDUCTION", " = ", "",
"Image Detect", "DP\\_IMAGE\\_DETECT", " = ", "",
"Extractor Trip", "DP\\_EXTRACTOR\\_TRIP", " = ", "",
"Beam Blanker Mode", "DP\\_EBBU\\_MODE", " = ", "",
"Crosshairs", "DP\\_CROSSHAIRS", " = ", "",
"VP Aperture", "DP\\_FIXED\\_APERTURE", " = ", "",
"Track Z", "DP\\_TRACK\\_Z", " = ", "",
"Sem", "DP\\_SEM", " = ", "",
"Supervisor", "DP\\_SUPERVISOR", " = ", "",
"User Calibration", "DP\\_USER\\_MAG\\_CAL", " = ", "",
"Condenser Normal", "DP\\_CONDENSER", " = ", "",
"Input LUT Mode", "DP\\_INPUT\\_LUT\\_MODE", " = ", "",
"Scan Gen", "DP\\_SCANGEN", " = ", "",
"Dwell Time", "DP\\_DWELL\\_TIME", " = ", "ns",
"User", "DP\\_USER", " = ", "",
"SCM Status", "DP\\_SCM\\_STATUS", " = ", "",
"Partial Vent on Standby", "DP\\_PARTIAL\\_VENT", " = ", "",
"Compuc. Mode", "DP\\_COMPUCENTRIC\\_MODE", " = ", "",
"Water OK", "DP\\_WATER\\_OK", " = ", "",
"Reference Mag", "DP\\_USE\\_REF\\_MAG", " = ", "",
"Sample Holder", "DP\\_SAMPLE\\_HOLDER", " = ", "",
"VPSE detector", "DP\\_VPSE", " = ", "",
"ScanGen Type", "DP\\_SCANGEN\\_TYPE", " = ", "",
"Frame Grabber", "DP\\_FRAME\\_GRABBER", " = ", "",
"BSD Auto Range", "DP\\_BSD\\_AUTO", " = ", "",
"Electron Counting", "DP\\_ELECTRON\\_COUNTING", " = ", "",
"FIB Present", "DP\\_FIB\\_PRESENT", " = ", "",
"High Current", "DP\\_HIGH\\_CURRENT", " = ", "",
"Flood State", "DP\\_FLOOD\\_STATE", " = ", "",
"Humidity Valve", "DP\\_HUMIDITY\\_VALVE", " = ", "",
"Dual Monitor", "DP\\_DUAL\\_MONITOR", " = ", "",
"EP Aperture", "DP\\_FIXED\\_APERTURE2", " = ", "",
"Mains Sync", "DP\\_MAINS\\_SYNC", " = ", "",
"FIB Milling Probe", "DP\\_FIB\\_MILL\\_PROBE", " = ", "",
"FIB Image Probe", "DP\\_FIB\\_IMAGE\\_PROBE", " = ", "",
"FIB Probe", "DP\\_FIB\\_PROBE", " = ", "",
"FIB Blanked", "DP\\_FIB\\_BLANKED", " = ", "",
"FIB Mode", "DP\\_FIB\\_MODE", " = ", "",
"Fast Mode", "DP\\_FAST\\_MODE", " = ", "",
"Condenser Reversed", "DP\\_CONDENSER\\_REVERSED", " = ", "",
"Peltier", "DP\\_PELTIER", " = ", "",
"Final Lens", "DP\\_FINAL\\_LENS", " = ", "",
"C.L.S.Valve", "DP\\_CLS\\_VALVE", " = ", "",
"FIB Suppressor is", "DP\\_FIB\\_SUPPRESSOR", " = ", "",
"Sem drift status", "DP\\_DC\\_SEM\\_STATE", " = ", "",
"Image saved", "DP\\_IMAGE\\_SAVED", " = ", "",
"FIB Gun Valve", "DP\\_FIB\\_GUN\\_VALVE", " = ", "",
"FIB Lock Mags", "DP\\_FIB\\_LOCK\\_MAG", " = ", "",
"FIB Scan", "DP\\_FIB\\_SCAN", " = ", "",
"EP Gas", "DP\\_EP\\_MODE", " = ", "",
"STEM Auto", "DP\\_STEM\\_AUTO", " = ", "",
"STEM Gain", "DP\\_STEM\\_GAIN", " = ", "",
"STEM Fast", "DP\\_STEM\\_FAST", " = ", "",
"STEM Q3", "DP\\_STEM\\_Q3", " = ", "",
"STEM Q2", "DP\\_STEM\\_Q2", " = ", "",
"STEM Q1", "DP\\_STEM\\_Q1", " = ", "",
"Field Mode", "DP\\_FIELD\\_MODE", " = ", "",
"End Detection", "DP\\_END\\_DETECTION", " = ", "",
"Use End Point Detection", "DP\\_USE\\_EPD", " = ", "",
"FIB Extractor Conflict", "DP\\_FIB\\_EXTRACTOR\\_CONFLICT", " = ", "",
"Large Beam Shift", "DP\\_LARGE\\_BEAMSHIFT", " = ", "",
"User Level", "DP\\_USER\\_LEVEL", " = ", "",
"Fisheye Mode", "DP\\_FISHEYE\\_MODE", " = ", "",
"Safe STEM Valid", "DP\\_SAFE\\_STEM\\_VALID", " = ", "",
"BSD Bandwidth", "DP\\_QUATTRO\\_BANDWIDTH", " = ", "",
"Fish-Eye Fitted", "DP\\_FISHEYE\\_FITTED", " = ", "",
"User Align", "DP\\_USER\\_ALIGN", " = ", "",
"Signal A Z1", "DP\\_SIGNALAZ1", " = ", "",
"Signal A Z0", "DP\\_SIGNALAZ0", " = ", "",
"Custom Holder", "DP\\_CUSTOM\\_HOLDER", " = ", "",
"GIS Channel", "DP\\_GIS\\_CHANNEL", " = ", "",
"EPSE Electrode", "DP\\_EPSE\\_ELECTRODE", " = ", "",
"Colour Mode", "DP\\_COLOUR\\_MODE", " = ", "",
"Recipe", "DP\\_RECIPE", " = ", "",
"SmartImage Noise Reduction", "DP\\_SI\\_NOISE\\_REDUCTION", " = ", "",
"FIB Tracking WD", "DP\\_FIB\\_TRACK\\_WD", " = ", "",
"SI source-hidden", "DP\\_SI\\_SOURCE", " = ", "",
"BSD Fast Scan", "DP\\_BSD\\_FAST\\_SCAN", " = ", "",
"Peltier Photo", "DP\\_PELTIER\\_PHOTO", " = ", "",
"CoolStage Type", "DP\\_COOLSTAGE\\_TYPE", " = ", "",
"SCD Bandwidth", "DP\\_SCD\\_BANDWIDTH", " = ", "",
"SCD Auto Range", "DP\\_SCD\\_AUTO", " = ", "",
"SCD Gain", "DP\\_SCD\\_GAIN", " = ", "",
"FIB Mag Range", "DP\\_FIB\\_MAG\\_RANGE", " = ", "",
"EPSE Bandwidth", "DP\\_EPSE\\_BANDWIDTH", " = ", "",
"EPSE Auto Range", "DP\\_EPSE\\_AUTO", " = ", "",
"EPSE Gain", "DP\\_EPSE\\_GAIN", " = ", "",
"FIB Error", "DP\\_FIB\\_ERROR", " = ", "",
"IGP Enabled", "DP\\_IGP\\_ENABLED", " = ", "",
"OptiProbe", "DP\\_OPTIPROBE", " = ", "",
"FIB Wide View", "DP\\_FIB\\_WIDE\\_VIEW", " = ", "",
"FIB Column", "DP\\_FIB\\_COLUMN", " = ", "",
"Argon Gun", "DP\\_AR\\_GUN", " = ", "",
"SESI Mode", "DP\\_ION\\_DETECTOR\\_MODE", " = ", "",
"Argon Mill", "DP\\_AR\\_MILL", " = ", "",
"VPSE-G3 Fitted", "DP\\_VPSE2", " = ", "",
"Q5", "DP\\_4QBSD\\_Q5", " = ", "",
"Jazz Gain", "DP\\_JAZZ\\_GAIN", " = ", "",
"Peltier Type", "DP\\_PELTIER\\_TYPE", " = ", "",
"Argon MFC Valve", "DP\\_AR\\_MFCVALVE", " = ", "",
"Jazz Bandwidth", "DP\\_JAZZ\\_BANDWIDTH", " = ", "",
"Argon Scan", "DP\\_AR\\_SCAN", " = ", "",
"CC Type", "DP\\_CC\\_TYPE", " = ", "",
"full service bakeout", "DP\\_BAKEOUT\\_FULL", " = ", "",
"GIS Channel with CC", "DP\\_CC\\_ON\\_GIS\\_CHANNEL", " = ", "",
"Stage Bias", "DP\\_STAGE\\_BIAS", " = ", "",
"Stage comms fail", "DP\\_STAGE\\_COMMS\\_FAIL", " = ", "",
"Vac comms fail", "DP\\_VAC\\_COMMS\\_FAIL", " = ", "",
"BSD Mode", "DP\\_BSD\\_MODE", " = ", "",
"VP Optibeam", "DP\\_VP\\_OPTIBEAM", " = ", "",
"HE-SE2 Fitted", "DP\\_HESE2\\_FITTED", " = ", "",
"MGS Evacuation State", "DP\\_MGS\\_EVAC\\_STATE", " = ", "",
"GIS Shutdown State", "DP\\_GIS\\_SHUTDOWN\\_STATE", " = ", "",
"InlensDuo Mode", "DP\\_INLENS\\_DUO\\_MODE", " = ", "",
"N on P Diode", "DP\\_BSD\\_N\\_ON\\_P", " = ", "",
"GIS Heating Status Channel 1", "DP\\_GIS\\_HEATING\\_STATUS\\_1", " = ", "",
"STEM Q5", "DP\\_STEM\\_Q5", " = ", "",
"STEM Q4", "DP\\_STEM\\_Q4", " = ", "",
"OptiBeam", "DP\\_OPTIBEAM\\_STATE", " = ", "",
"Beam State", "DP\\_RUNUPSTATE", " = ", "",
"Operating Mode", "DP\\_OPERATING\\_MODE", " = ", "",
"C3 Reversal", "DP\\_C3REVERSAL", " = ", "",
"Scan Speed", "DP\\_SCANRATE", " = ", "",
"Cal Mode", "DP\\_CALMODE", " = ", "",
"STEM Seg. Mode", "DP\\_STEM\\_SEG\\_MODE", " = ", "",
"Vac Status", "DP\\_VACSTATUS", " = ", "",
"Column Chamber valve", "DP\\_COLUMN\\_CHAMBER\\_VALVE", " = ", "",
"Column pumping", "DP\\_COLUMN\\_PUMPING", " = ", "",
"Noise Reduction", "DP\\_NOISE\\_REDUCTION", " = ", "",
"All Frozen", "DP\\_LEFT\\_FROZEN", " = ", "",
"CC Status", "DP\\_CC\\_STATUS", " = ", "",
"Argon Gun is", "DP\\_AR\\_GUN\\_STATE", " = ", "",
"Output To", "DP\\_OUT\\_TYPE", " = ", "",
"Vacuum Mode", "DP\\_VAC\\_MODE", " = ", "",
"FIB Imaging", "DP\\_FIB\\_IMAGING", " = ", "",
"FIB Gun State", "DP\\_FIB\\_GUN\\_STATE", " = ", "",
"C3 Lens I", "AP\\_C3", " = ", "[kmunpf]?A",
"C2 Lens I", "AP\\_C2", " = ", "[kmunpf]?A",
"C1 Lens I", "AP\\_C1", " = ", "[kmunpf]?A",
"Stage Angle", "AP\\_STAGEANGLE", " = ", "",
"Scan Orth corrn", "AP\\_SCANORTHOG", " = ", "",
"Scan Rotation", "AP\\_SCANROTATION", " = ", "",
"WD", "AP\\_WD", " = ", "[cmunpf]?m",
"Mag", "AP\\_MAG", " = ", "K? X",
"Mag Comp. Amplitude", "AP\\_MAG\\_COMP\\_AMPL", " = ", "%",
"Brightness", "AP\\_BRIGHTNESS", " = ", "%",
"Fil I Target", "AP\\_MANUALCURRENT", " = ", "[kmunpf]?A",
"EHT Target", "AP\\_MANUALKV", " = ", "[Mkmunpf]?V",
"Fil I (Usermax)", "AP\\_USERMAXCURRENT", " = ", "[kmunpf]?A",
"I Probe", "AP\\_IPROBE", " = ", "[kmunpf]?A",
"Emission Zoom", "AP\\_EMISSIONZOOM", " = ", "",
"Cycle Time", "AP\\_FRAME\\_TIME", " = ", "Secs",
"Line Time", "AP\\_LINE\\_TIME", " = ", "[munpf]?s",
"FCF Tilt Angle", "AP\\_FCF\\_TILT", " = ", "",
"Tilt Angle", "AP\\_TILT\\_ANGLE", " = ", "",
"Tilt Axis", "AP\\_TILT\\_AXIS", " = ", "",
"C3 Rem", "AP\\_C3REM", " = ", "",
"C3 Cal", "AP\\_C3CAL", " = ", "",
"C2 Rem", "AP\\_C2REM", " = ", "",
"C2 Cal", "AP\\_C2CAL", " = ", "",
"C1 Rem", "AP\\_C1REM", " = ", "",
"C1 Cal", "AP\\_C1CAL", " = ", "",
"Mag Comp. Offset", "AP\\_MAG\\_COMP\\_OFFSET", " = ", "",
"Stigmation X", "AP\\_STIG\\_X", " = ", "%",
"Aperture Posn Y", "AP\\_APERTUREPOSN\\_Y", " = ", "[cmunpf]?m",
"Aperture Posn X", "AP\\_APERTUREPOSN\\_X", " = ", "[cmunpf]?m",
"Aperture Size", "AP\\_APERTURESIZE", " = ", "[cmunpf]?m",
"Zoom Posn Y", "AP\\_ZOOMPOS\\_Y", " = ", "",
"Zoom Posn X", "AP\\_ZOOMPOS\\_X", " = ", "",
"Beam Shift Y", "AP\\_BEAMSHIFT\\_Y", " = ", "%",
"Beam Shift X", "AP\\_BEAMSHIFT\\_X", " = ", "%",
"Gun Tilt Y", "AP\\_GUNTILT\\_Y", " = ", "%",
"Gun Tilt X", "AP\\_GUNTILT\\_X", " = ", "%",
"Gun Shift Y", "AP\\_GUNSHIFT\\_Y", " = ", "%",
"Gun Shift X", "AP\\_GUNSHIFT\\_X", " = ", "%",
"Mag Cal Actual Height", "AP\\_MAGCALHEIGHT", " = ", "[cmunpf]?m",
"Mag Cal Actual Width", "AP\\_MAGCALWIDTH", " = ", "[cmunpf]?m",
"Red.Raster Height", "AP\\_RED\\_RASTER\\_H", " = ", "",
"Red.Raster Width", "AP\\_RED\\_RASTER\\_W", " = ", "",
"Red.Raster Posn Y", "AP\\_RED\\_RASTER\\_POSN\\_Y", " = ", "",
"Red.Raster Posn X", "AP\\_RED\\_RASTER\\_POSN\\_X", " = ", "",
"Focus Rotation comp.", "AP\\_FOCUS\\_ROTATION\\_COMP", " = ", "[Mkmunpf]?V",
"Dual Mag Offset Y", "AP\\_DUAL\\_MAG\\_OFFSET\\_Y", " = ", "",
"Dual Mag Offset X", "AP\\_DUAL\\_MAG\\_OFFSET\\_X", " = ", "",
"Spot at Y", "AP\\_SPOT\\_POSN\\_Y", " = ", "",
"Spot at X", "AP\\_SPOT\\_POSN\\_X", " = ", "",
"Zoom factor", "AP\\_ZOOM\\_FACTOR", " = ", "",
"Stigmation Y", "AP\\_STIG\\_Y", " = ", "%",
"Pb 4", "AP\\_PPB\\_3", " = ", "",
"Pb 3", "AP\\_PPB\\_2", " = ", "",
"Pb 2", "AP\\_PPB\\_1", " = ", "",
"Pb 1", "AP\\_PPB\\_0", " = ", "",
"Pa 4", "AP\\_PPA\\_3", " = ", "[cmunpf]?m",
"Pa 3", "AP\\_PPA\\_2", " = ", "[cmunpf]?m",
"Pa 2", "AP\\_PPA\\_1", " = ", "[cmunpf]?m",
"Pa 1", "AP\\_PPA\\_0", " = ", "[cmunpf]?m",
"Da 4", "AP\\_RADIAL\\_3", " = ", "[cmunpf]?m",
"Da 3", "AP\\_RADIAL\\_2", " = ", "[cmunpf]?m",
"Da 2", "AP\\_RADIAL\\_1", " = ", "[cmunpf]?m",
"Da 1", "AP\\_RADIAL\\_0", " = ", "[cmunpf]?m",
"Aa 4", "AP\\_ANGULAR\\_3", " = ", "[Mkmunpf]?V",
"Aa 3", "AP\\_ANGULAR\\_2", " = ", "[Mkmunpf]?V",
"Aa 2", "AP\\_ANGULAR\\_1", " = ", "",
"Aa 1", "AP\\_ANGULAR\\_0", " = ", "",
"Stage fields Y", "AP\\_STAGE\\_FIELDS\\_Y", " = ", "",
"Stage fields X", "AP\\_STAGE\\_FIELDS\\_X", " = ", "",
"Stage scan angle", "AP\\_STAGE\\_SCAN\\_ANGLE", " = ", "",
"Stage vector Z", "AP\\_STAGE\\_VECTOR\\_Z", " = ", "%",
"Stage vector Y", "AP\\_STAGE\\_VECTOR\\_Y", " = ", "%",
"Stage vector X", "AP\\_STAGE\\_VECTOR\\_X", " = ", "%",
"Stage goto Z", "AP\\_STAGE\\_GOTO\\_Z", " = ", "[cmunpf]?m",
"Stage goto Y", "AP\\_STAGE\\_GOTO\\_Y", " = ", "[cmunpf]?m",
"Stage goto X", "AP\\_STAGE\\_GOTO\\_X", " = ", "[cmunpf]?m",
"Profile width", "AP\\_PROFILE\\_W", " = ", "[cmunpf]?m",
"EHT set maximum", "AP\\_EHT\\_SET\\_MAX", " = ", "[Mkmunpf]?V",
"Beam Current", "AP\\_BEAM\\_CURRENT", " = ", "[kmunpf]?A",
"Pixel Size", "AP\\_PIXEL\\_SIZE", " = ", "[cmunpf]?m",
"Gun Vacuum", "AP\\_COLUMN\\_VAC", " = ", "mbar|Torr",
"System Vacuum", "AP\\_SYSTEM\\_VAC", " = ", "mbar|Torr",
"Stage low Z", "AP\\_STAGE\\_LOW\\_Z", " = ", "[cmunpf]?m",
"Stage low Y", "AP\\_STAGE\\_LOW\\_Y", " = ", "[cmunpf]?m",
"Stage low X", "AP\\_STAGE\\_LOW\\_X", " = ", "[cmunpf]?m",
"Stage high Z", "AP\\_STAGE\\_HIGH\\_Z", " = ", "[cmunpf]?m",
"Stage high Y", "AP\\_STAGE\\_HIGH\\_Y", " = ", "[cmunpf]?m",
"Stage high X", "AP\\_STAGE\\_HIGH\\_X", " = ", "[cmunpf]?m",
"Stage at field Y", "AP\\_STAGE\\_AT\\_FIELD\\_Y", " = ", "",
"Stage at field X", "AP\\_STAGE\\_AT\\_FIELD\\_X", " = ", "",
"Stage goto field Y", "AP\\_STAGE\\_GOTO\\_FIELD\\_Y", " = ", "",
"Stage goto field X", "AP\\_STAGE\\_GOTO\\_FIELD\\_X", " = ", "",
"Stage field size Y", "AP\\_STAGE\\_FIELD\\_SIZE\\_Y", " = ", "[cmunpf]?m",
"Stage field size X", "AP\\_STAGE\\_FIELD\\_SIZE\\_X", " = ", "[cmunpf]?m",
"Contrast", "AP\\_CONTRAST", " = ", "%",
"Offset A", "AP\\_OFFSET", " = ", "%",
"Gain A", "AP\\_GAIN", " = ", "%",
"Gamma", "AP\\_GAMMA", " = ", "",
"Line int. count", "AP\\_LINE\\_INT\\_COUNT", " = ", "",
"Frames to Int.", "AP\\_FRAME\\_INT\\_COUNT", " = ", "",
"Frames to average", "AP\\_FRAME\\_AVERAGE\\_COUNT", " = ", "",
"Mix Signal", "AP\\_K2", " = ", "",
"Signal", "AP\\_K1", " = ", "",
"Specimen I", "AP\\_SCM", " = ", "[kmunpf]?A",
"Mag Z1", "AP\\_MAG1", " = ", "",
"Mag Z0", "AP\\_MAG0", " = ", "",
"Collector Bias", "AP\\_COLLECTOR\\_BIAS", " = ", "[Mkmunpf]?V",
"Auto C Target", "AP\\_AUTO\\_CONTRAST", " = ", "%",
"Auto B Target", "AP\\_AUTO\\_BRIGHT", " = ", "%",
"Frame Ampl Cal.", "AP\\_FRAME\\_AMPL", " = ", "",
"Offset B", "AP\\_IMPLIED\\_OFFSET", " = ", "%",
"Gain B", "AP\\_IMPLIED\\_GAIN", " = ", "%",
"Filament Age", "AP\\_FILAMENT\\_AGE", " = ", "Hours",
"Beam Offset Y", "AP\\_BEAM\\_OFFSET\\_Y", " = ", "[cmunpf]?m",
"Beam Offset X", "AP\\_BEAM\\_OFFSET\\_X", " = ", "[cmunpf]?m",
"Height", "AP\\_HEIGHT", " = ", "[cmunpf]?m",
"Width", "AP\\_WIDTH", " = ", "[cmunpf]?m",
"Conjugate posn.", "AP\\_CONJUGATE", " = ", "[cmunpf]?m",
"Dual Mag Gain Y", "AP\\_DUAL\\_MAG\\_Y\\_SLOPE", " = ", "",
"Focus", "AP\\_ALIAS\\_WD", " = ", "[cmunpf]?m",
"Dual Mag Gain X", "AP\\_DUAL\\_MAG\\_SLOPE", " = ", "",
"Min Mag", "AP\\_MINMAG", " = ", "X",
"Spot Size", "AP\\_SPOTSIZE", " = ", "",
"N", "AP\\_NR\\_COEFF", " = ", "",
"Line Avg.Count", "AP\\_LINE\\_AVERAGE\\_COUNT", " = ", "",
"Photo No.", "AP\\_PHOTO\\_NUMBER", " = ", "",
"Scan Y cal.", "AP\\_SCAN\\_OFFSET\\_Y", " = ", "",
"Scan X cal.", "AP\\_SCAN\\_OFFSET\\_X", " = ", "",
"Field Overlap", "AP\\_FIELD\\_OVERLAP", " = ", "%",
"Xtalk21", "AP\\_XTALK21", " = ", "",
"Xtalk12", "AP\\_XTALK12", " = ", "",
"Focus scan min", "AP\\_MIN\\_WD", " = ", "[cmunpf]?m",
"Focus scan max", "AP\\_MAX\\_WD", " = ", "[cmunpf]?m",
"Area Fraction", "AP\\_AREA\\_FRACTION", " = ", "%",
"White Threshold", "AP\\_WHITE\\_DETECT", " = ", "%",
"Black Threshold", "AP\\_BLACK\\_DETECT", " = ", "%",
"EHT Set minimum", "AP\\_EHT\\_SET\\_MIN", " = ", "[Mkmunpf]?V",
"Mag Shift Cal Y", "AP\\_MAG\\_SHIFT\\_Y", " = ", "",
"Mag Shift Cal X", "AP\\_MAG\\_SHIFT\\_X", " = ", "",
"Stage vector T", "AP\\_STAGE\\_VECTOR\\_T", " = ", "%",
"Stage vector R", "AP\\_STAGE\\_VECTOR\\_R", " = ", "%",
"Stage goto T", "AP\\_STAGE\\_GOTO\\_T", " = ", "",
"Stage goto R", "AP\\_STAGE\\_GOTO\\_R", " = ", "",
"Beam Time", "AP\\_BEAM\\_TIME", " = ", "Hours",
"Spot signal", "AP\\_SPOT", " = ", "",
"Extractor V", "AP\\_ACTUALEXT", " = ", "[Mkmunpf]?V",
"Peltier Temp", "AP\\_HCSTAGE\\_TEMP", " = ", "C",
"Stage low T", "AP\\_STAGE\\_LOW\\_T", " = ", "",
"Stage high T", "AP\\_STAGE\\_HIGH\\_T", " = ", "",
"Nominal Fil I", "AP\\_NOMINALFIL", " = ", "[kmunpf]?A",
"Nominal extractor V", "AP\\_NOMINALEXT", " = ", "[Mkmunpf]?V",
"Ext I Monitor", "AP\\_EXTCURRENT", " = ", "[kmunpf]?A",
"Liner Tube", "AP\\_ACTUALLENS", " = ", "[Mkmunpf]?V",
"Suppressor V", "AP\\_ACTUALSUPP", " = ", "[Mkmunpf]?V",
"Extractor V Target", "AP\\_MANUALEXT", " = ", "[Mkmunpf]?V",
"Test Val", "AP\\_TEST\\_VAL", " = ", "",
"Test No.", "AP\\_TEST\\_N", " = ", "",
"Gun at Y", "AP\\_GUN\\_Y", " = ", "%",
"Gun at X", "AP\\_GUN\\_X", " = ", "%",
"Aperture at Y", "AP\\_APERTURE\\_Y", " = ", "%",
"Aperture at X", "AP\\_APERTURE\\_X", " = ", "%",
"Aperture Align Y", "AP\\_APERTURE\\_ALIGN\\_Y", " = ", "%",
"Aperture Align X", "AP\\_APERTURE\\_ALIGN\\_X", " = ", "%",
"Gun Align Y", "AP\\_GUNALIGN\\_Y", " = ", "%",
"Gun Align X", "AP\\_GUNALIGN\\_X", " = ", "%",
"Chamber", "AP\\_CHAMBER\\_PRESSURE", " = ", "[GMkm]?Pa",
"VP Target", "AP\\_HP\\_TARGET", " = ", "[GMkm]?Pa",
"Stage goto M", "AP\\_STAGE\\_GOTO\\_M", " = ", "[cmunpf]?m",
"Max Extractor V", "AP\\_MAX\\_EXTRACTOR\\_V", " = ", "[Mkmunpf]?V",
"EHT Cal@30KV", "AP\\_EHT\\_CAL\\_30KV", " = ", "[Mkmunpf]?V",
"EHT Cal@24KV", "AP\\_EHT\\_CAL\\_24KV", " = ", "[Mkmunpf]?V",
"EHT Cal@10KV", "AP\\_EHT\\_CAL\\_10KV", " = ", "[Mkmunpf]?V",
"EHT Cal@0.1KV", "AP\\_EHT\\_CAL\\_100", " = ", "[Mkmunpf]?V",
"Cursor Height", "AP\\_CURSOR\\_HEIGHT", " = ", "[cmunpf]?m",
"Cursor Width", "AP\\_CURSOR\\_WIDTH", " = ", "[cmunpf]?m",
"Profile Top", "AP\\_PROFILE\\_TOP", " = ", "",
"Min Extractor V", "AP\\_MIN\\_EXT", " = ", "[Mkmunpf]?V",
"Liner Target", "AP\\_MANUALLENS", " = ", "[Mkmunpf]?V",
"Suppressor V Target", "AP\\_MANUALSUPP", " = ", "[Mkmunpf]?V",
"Pa 6", "AP\\_PPA\\_5", " = ", "[cmunpf]?m",
"Pa 5", "AP\\_PPA\\_4", " = ", "[cmunpf]?m",
"Profile Width 2", "AP\\_PROFILE\\_W2", " = ", "[cmunpf]?m",
"Profile Width 1", "AP\\_PROFILE\\_W1", " = ", "[cmunpf]?m",
"Mag Gain Cal Y", "AP\\_MAG\\_GAIN\\_Y", " = ", "",
"Mag Gain Cal X", "AP\\_MAG\\_GAIN\\_X", " = ", "",
"Stage Vector M", "AP\\_STAGE\\_VECTOR\\_M", " = ", "%",
"Stage high M", "AP\\_STAGE\\_HIGH\\_M", " = ", "[cmunpf]?m",
"Stage low M", "AP\\_STAGE\\_LOW\\_M", " = ", "[cmunpf]?m",
"H 6", "AP\\_H\\_5", " = ", "[cmunpf]?m",
"H 5", "AP\\_H\\_4", " = ", "[cmunpf]?m",
"H 4", "AP\\_H\\_3", " = ", "[cmunpf]?m",
"H 3", "AP\\_H\\_2", " = ", "[cmunpf]?m",
"H 2", "AP\\_H\\_1", " = ", "[cmunpf]?m",
"H 1", "AP\\_H\\_0", " = ", "[cmunpf]?m",
"Pb 7", "AP\\_PPB\\_6", " = ", "",
"Pb 6", "AP\\_PPB\\_5", " = ", "",
"Pb 5", "AP\\_PPB\\_4", " = ", "",
"Pa 10", "AP\\_PPA\\_9", " = ", "[cmunpf]?m",
"Pa 9", "AP\\_PPA\\_8", " = ", "[cmunpf]?m",
"Pa 8", "AP\\_PPA\\_7", " = ", "[cmunpf]?m",
"Pa 7", "AP\\_PPA\\_6", " = ", "[cmunpf]?m",
"EO Temp", "AP\\_WATER\\_TEMP", " = ", "C",
"FCF Setting", "AP\\_FCF\\_SETTING", " = ", "%",
"V 10", "AP\\_V\\_9", " = ", "[cmunpf]?m",
"V 9", "AP\\_V\\_8", " = ", "[cmunpf]?m",
"V 8", "AP\\_V\\_7", " = ", "[cmunpf]?m",
"V 7", "AP\\_V\\_6", " = ", "[cmunpf]?m",
"V 6", "AP\\_V\\_5", " = ", "[cmunpf]?m",
"V 5", "AP\\_V\\_4", " = ", "[cmunpf]?m",
"V 4", "AP\\_V\\_3", " = ", "[cmunpf]?m",
"V 3", "AP\\_V\\_2", " = ", "[cmunpf]?m",
"V 2", "AP\\_V\\_1", " = ", "[cmunpf]?m",
"V 1", "AP\\_V\\_0", " = ", "[cmunpf]?m",
"H 10", "AP\\_H\\_9", " = ", "[cmunpf]?m",
"H 9", "AP\\_H\\_8", " = ", "[cmunpf]?m",
"H 8", "AP\\_H\\_7", " = ", "[cmunpf]?m",
"H 7", "AP\\_H\\_6", " = ", "[cmunpf]?m",
"Stage Delta M", "AP\\_STAGE\\_DELTA\\_M", " = ", "[cmunp]?mm",
"Stage Delta R", "AP\\_STAGE\\_DELTA\\_R", " = ", "",
"Stage Delta T", "AP\\_STAGE\\_DELTA\\_T", " = ", "",
"Stage Delta Z", "AP\\_STAGE\\_DELTA\\_Z", " = ", "[cmunpf]?m",
"Stage Delta Y", "AP\\_STAGE\\_DELTA\\_Y", " = ", "[cmunpf]?m",
"Stage Delta X", "AP\\_STAGE\\_DELTA\\_X", " = ", "[cmunpf]?m",
"Spacer Thickness", "AP\\_SPACER\\_THICKNESS", " = ", "[cmunpf]?m",
"Stage Centre Y", "AP\\_STAGE\\_CENTRE\\_Y", " = ", "[cmunpf]?m",
"Stage Centre X", "AP\\_STAGE\\_CENTRE\\_X", " = ", "[cmunpf]?m",
"Compu. Height", "AP\\_SAMPLE\\_HEIGHT", " = ", "[cmunpf]?m",
"EO Temp Limit", "AP\\_WATER\\_TEMP\\_LIMIT", " = ", "C",
"Image Pixel Size", "AP\\_IMAGE\\_PIXEL\\_SIZE", " = ", "[cmunpf]?m",
"Db 2", "AP\\_RADIAL\\_AREA\\_1", " = ", "[cmunpf]?m",
"Db 1", "AP\\_RADIAL\\_AREA\\_0", " = ", "[cmunpf]?m",
"User Max EHT", "AP\\_USER\\_MAX\\_EHT", " = ", "[Mkmunpf]?V",
"Profile 2 X2", "AP\\_PROF2\\_X2", " = ", "",
"Profile 2 X1", "AP\\_PROF2\\_X1", " = ", "",
"Profile 1 X2", "AP\\_PROF1\\_X2", " = ", "",
"Profile 1 X1", "AP\\_PROF1\\_X1", " = ", "",
"Semi Angle", "AP\\_SEMIANGLE", " = ", "rad",
"Spot X Cal", "AP\\_SPOT\\_X\\_CAL", " = ", "",
"CCD Illum.", "AP\\_CCD\\_ILLUMINATION", " = ", "%",
"Db 4", "AP\\_RADIAL\\_AREA\\_3", " = ", "[cmunpf]?m",
"Db 3", "AP\\_RADIAL\\_AREA\\_2", " = ", "[cmunpf]?m",
"VP LaB6 Limit", "AP\\_VP\\_LIMIT", " = ", "[GMkm]?Pa",
"HRRU No.", "AP\\_HRRU\\_NUMBER", " = ", "",
"Print No.", "AP\\_PRINT\\_NUMBER", " = ", "",
"File No", "AP\\_FILE\\_NUMBER", " = ", "",
"Specimen Height", "AP\\_SPECIMEN\\_HEIGHT", " = ", "[cmunpf]?m",
"Compu. Tilt Error", "AP\\_COMPU\\_TILT\\_ERROR", " = ", "",
"FIB EHT", "AP\\_FIB\\_EHT\\_ACTUAL", " = ", "[Mkmunpf]?V",
"FIB EHT Target", "AP\\_FIB\\_EHT\\_TARGET", " = ", "[Mkmunpf]?V",
"ESD Excitation", "AP\\_ESD\\_EXCITATION", " = ", "%",
"ESD Lower Y", "AP\\_ESD\\_LOWER\\_Y", " = ", "%",
"ESD Lower X", "AP\\_ESD\\_LOWER\\_X", " = ", "%",
"ESD Upper Y", "AP\\_ESD\\_UPPER\\_Y", " = ", "%",
"ESD Upper X", "AP\\_ESD\\_UPPER\\_X", " = ", "%",
"Stage low R", "AP\\_STAGE\\_LOW\\_R", " = ", "",
"Stage high R", "AP\\_STAGE\\_HIGH\\_R", " = ", "",
"Stig. Cal Y", "AP\\_STIG\\_CAL\\_Y", " = ", "%",
"Stig. Cal X", "AP\\_STIG\\_CAL\\_X", " = ", "%",
"Opt. Semi Angle", "AP\\_OPT\\_SEMIANGLE", " = ", "rad",
"FIB Condenser", "AP\\_FIB\\_CONDENSER", " = ", "[Mkmunpf]?V",
"FIB Extractor", "AP\\_FIB\\_EXT\\_ACTUAL", " = ", "[Mkmunpf]?V",
"FIB Extr.Target", "AP\\_FIB\\_EXT\\_TARGET", " = ", "[Mkmunpf]?V",
"FIB Aper.Align Y", "AP\\_FIB\\_APERTURE\\_ALIGN\\_Y", " = ", "",
"FIB Aper.Align X", "AP\\_FIB\\_APERTURE\\_ALIGN\\_X", " = ", "",
"FIB Scan Rot", "AP\\_FIB\\_SCAN\\_ROTATION", " = ", "",
"FIB Beam Shift Y", "AP\\_FIB\\_BEAM\\_SHIFT\\_Y", " = ", "[cmunpf]?m",
"FIB Beam Shift X", "AP\\_FIB\\_BEAM\\_SHIFT\\_X", " = ", "[cmunpf]?m",
"FIB Stig Y", "AP\\_FIB\\_STIGMATOR\\_Y", " = ", "%",
"FIB Stig X", "AP\\_FIB\\_STIGMATOR\\_X", " = ", "%",
"FIB Mag", "AP\\_FIB\\_MAGNIFICATION", " = ", "X",
"FIB Objective", "AP\\_FIB\\_OBJECTIVE\\_POTENTIAL", " = ", "[Mkmunpf]?V",
"FIB Fil V target", "AP\\_FIB\\_FIL\\_V\\_TARGET", " = ", "[Mkmunpf]?V",
"FIB Fil I Target", "AP\\_FIB\\_FIL\\_I\\_TARGET", " = ", "[kmunpf]?A",
"FIB Fil Voltage", "AP\\_FIB\\_FIL\\_V", " = ", "[Mkmunpf]?V",
"FIB Fil Current", "AP\\_FIB\\_FIL\\_I", " = ", "[kmunpf]?A",
"Frame Counter Range Error", "AP\\_FRAME\\_COUNTER", " ", "",
"FIB Emission I", "AP\\_FIB\\_EMISSION\\_CURRENT", " = ", "[kmunpf]?A",
"FIB Suppressor Target", "AP\\_FIB\\_SUPPRESSOR\\_TARGET", " = ", "[Mkmunpf]?V",
"FIB Shift Correction X", "AP\\_FIB\\_SHIFT\\_CORRECTION\\_X", " = ", "[cmunpf]?m",
"Humidity Target", "AP\\_HUMIDITY\\_TARGET", " = ", "%",
"Humidity", "AP\\_HUMIDITY", " = ", "%",
"Peltier Target", "AP\\_PELTIER\\_TARGET", " = ", "C",
"Free WD", "AP\\_FREE\\_WD", " = ", "[cmunpf]?m",
"FIB Stig Y Centre Y", "AP\\_FIB\\_STIG\\_Y\\_CENTRE\\_Y", " = ", "",
"FIB Stig Y Centre X", "AP\\_FIB\\_STIG\\_Y\\_CENTRE\\_X", " = ", "",
"FIB Drift Y", "AP\\_FIB\\_DRIFT\\_Y", " = ", "[cmunpf]?m",
"FIB Drift X", "AP\\_FIB\\_DRIFT\\_X", " = ", "[cmunpf]?m",
"FIB Stig X Centre Y", "AP\\_FIB\\_STIG\\_X\\_CENTRE\\_Y", " = ", "",
"FIB Stig X Centre X", "AP\\_FIB\\_STIG\\_X\\_CENTRE\\_X", " = ", "",
"FIB Emission Target", "AP\\_FIB\\_EMISSION\\_TARGET", " = ", "[kmunpf]?A",
"FIB Suppressor", "AP\\_FIB\\_SUPPRESSOR", " = ", "[Mkmunpf]?V",
"Purge Min", "AP\\_PURGE\\_MIN", " = ", "[GMkm]?Pa",
"Purge Max", "AP\\_PURGE\\_MAX", " = ", "[GMkm]?Pa",
"Purge cycles", "AP\\_PURGE\\_CYCLES", " = ", "",
"FIB SEM Angle", "AP\\_FIB\\_SEM\\_ANGLE", " = ", "",
"SEM Level @", "AP\\_SEM\\_LEVEL\\_AT\\_TILT", " = ", "",
"Drift Max Tries", "AP\\_DC\\_MAX\\_ATTEMPTS", " = ", "",
"Drift Min Conf", "AP\\_DC\\_MIN\\_CONF", " = ", "%",
"Drift Max.Pix.Error", "AP\\_DC\\_MAX\\_PIX\\_ERROR", " = ", "",
"EP Target", "AP\\_EP\\_TARGET", " = ", "[GMkm]?Pa",
"FIB Shift Correction Y", "AP\\_FIB\\_SHIFT\\_CORRECTION\\_Y", " = ", "[cmunpf]?m",
"FIB Focus", "AP\\_FIB\\_FOCUS", " = ", "",
"HSync delay", "AP\\_HSYNC\\_DELAY", " = ", "[munpf]?s",
"Piezo at Y", "AP\\_PIEZO\\_AT\\_Y", " = ", "[cmunpf]?m",
"Piezo at X", "AP\\_PIEZO\\_AT\\_X", " = ", "[cmunpf]?m",
"ESB Grid Max", "AP\\_ESB\\_GRID\\_MAX", " = ", "[Mkmunpf]?V",
"ESB Grid", "AP\\_ESB\\_GRID", " = ", "[Mkmunpf]?V",
"Field Mode Quadriture", "AP\\_FM\\_QUADRITURE", " = ", "",
"Field Mode Orthog", "AP\\_FM\\_ORTHOG", " = ", "",
"Field Mode Angle ", "AP\\_FM\\_ANGLE", " = ", "",
"FIB Heating Limit", "AP\\_FIB\\_HEATING\\_LIMIT", " = ", "[kmunpf]?A",
"EPD Low Limit", "AP\\_EPD\\_LOW", " = ", "",
"EPD High Limit", "AP\\_EPD\\_HIGH", " = ", "",
"Vac Ready @", "AP\\_VAC\\_READY\\_AT", " = ", "mbar|Torr",
"FIB Tilt Comp", "AP\\_FIB\\_TILT\\_COMP", " = ", "",
"Mill List Elapsed Time", "AP\\_MILL\\_LIST\\_ELAPSED\\_TIME", " = ", "[munpf]?s",
"Mill List Total Time", "AP\\_MILL\\_LIST\\_TOTAL\\_TIME", " = ", "[munpf]?s",
"FIB Pixel Size", "AP\\_FIB\\_PIXEL\\_SIZE", " = ", "[cmunpf]?m",
"Line Counter", "AP\\_LINE\\_COUNTER", " = ", "",
"Slice Angle", "AP\\_FIB\\_SLICE\\_ANGLE", " = ", "",
"Slice Height", "AP\\_FIB\\_SLICE\\_HEIGHT", " = ", "[cmunpf]?m",
"Slice Width", "AP\\_FIB\\_SLICE\\_WIDTH", " = ", "[cmunpf]?m",
"Slice Y", "AP\\_FIB\\_SLICE\\_Y", " = ", "[cmunpf]?m",
"Slice X", "AP\\_FIB\\_SLICE\\_X", " = ", "[cmunpf]?m",
"Slice Index", "AP\\_FIB\\_SLICE\\_INDEX", " = ", "",
"Fisheye quadriture", "AP\\_FISHEYE\\_QUADRITURE", " = ", "",
"Fisheye Orthog", "AP\\_FISHEYE\\_ORTHOG", " = ", "",
"Fisheye Angle", "AP\\_FISHEYE\\_ANGLE", " = ", "",
"Contrast B", "AP\\_CONTRASTZ1", " = ", "%",
"Contrast A", "AP\\_CONTRASTZ0", " = ", "%",
"Brightness B", "AP\\_BRIGHTNESSZ1", " = ", "%",
"Brightness A", "AP\\_BRIGHTNESSZ0", " = ", "%",
"Defect ID", "AP\\_DEFECT\\_ID", " = ", "",
"FIB Gun Pressure", "AP\\_FIB\\_GUN\\_PRESSURE", " = ", "mbar|Torr",
"Stage X+M Angle", "AP\\_STAGE\\_XM\\_ANGLE", " = ", "",
"Mill Item Elapsed Time", "AP\\_MILL\\_ITEM\\_ELAPSED\\_TIME", " = ", "[munpf]?s",
"Mill Item Total Time", "AP\\_MILL\\_ITEM\\_TOTAL\\_TIME", " = ", "[munpf]?s",
"FIB Min. Autoheat Current", "AP\\_FIB\\_MIN\\_AUTOHEAT\\_CURRENT", " = ", "[kmunpf]?A",
"Stage X+M Rotation", "AP\\_STAGE\\_XM\\_R", " = ", "",
"FIB Nudge Step", "AP\\_FIB\\_NUDGE\\_STEP", " = ", "[cmunpf]?m",
"Holder Height", "AP\\_HOLDER\\_HEIGHT", " = ", "[cmunpf]?m",
"Holder Length", "AP\\_HOLDER\\_LENGTH", " = ", "[cmunpf]?m",
"Holder Width", "AP\\_HOLDER\\_WIDTH", " = ", "[cmunpf]?m",
"Holder Diameter", "AP\\_HOLDER\\_DIAMETER", " = ", "[cmunpf]?m",
"SmartImage Sharpening", "AP\\_SI\\_FACTOR", " = ", "%",
"SmartImage Threshold", "AP\\_SI\\_THRESHOLD", " = ", "%",
"SmartImage Contrast", "AP\\_SI\\_ENHANCEMENT", " = ", "%",
"Compu. Tilt Offset", "AP\\_COMPU\\_TILT\\_OFFSET", " = ", "[cmunpf]?m",
"Laser Illumination", "AP\\_LASER\\_FINDER\\_ILLUM", " = ", "%",
"FIB Condenser actual", "AP\\_FIB\\_CONDENSER\\_ACTUAL", " = ", "[Mkmunpf]?V",
"VPSE G3 Bias", "AP\\_VPSE2\\_BIAS", " = ", "%",
"EPSE Bias", "AP\\_EPSE\\_BIAS", " = ", "%",
"ESB Grid is", "AP\\_ESB\\_GRID\\_IS", " = ", "[Mkmunpf]?V",
"Liner Cal @ 10KV", "AP\\_LINER\\_CAL\\_AT\\_10KV", " = ", "[Mkmunpf]?V",
"Liner cal @ 100V", "AP\\_LINER\\_CAL\\_AT\\_100V", " = ", "[Mkmunpf]?V",
"SmartImage Topography", "AP\\_SI\\_TOPOGRAPHY", " = ", "%",
"Piezo Exchange Y", "AP\\_PIEZO\\_EXCHANGE\\_Y", " = ", "[cmunpf]?m",
"Piezo Exchange X", "AP\\_PIEZO\\_EXCHANGE\\_X", " = ", "[cmunpf]?m",
"Specimen Diameter", "AP\\_SPECIMEN\\_DIAMETER", " = ", "[cmunpf]?m",
"FIB Track WD Delta", "AP\\_FIB\\_TRACK\\_WD\\_DELTA", " = ", "[cmunpf]?m",
"Convertor Voltage", "AP\\_ION\\_CONVERTOR\\_VOLTAGE", " = ", "[Mkmunpf]?V",
"Collector Voltage", "AP\\_ION\\_COLLECTOR\\_VOLTAGE", " = ", "[Mkmunpf]?V",
"FIB Source Lifetime", "AP\\_FIB\\_SOURCE\\_LIFETIME", " = ", "[kmunpf]?Ah",
"FIB Probe Current Actual", "AP\\_FIB\\_PROBE\\_CURRENT\\_ACTUAL", " = ", "[kmunpf]?A",
"FIB Objective Actual", "AP\\_FIB\\_OBJECTIVE\\_ACTUAL", " = ", "[Mkmunpf]?V",
"Argon V Int is", "AP\\_AR\\_V\\_INT\\_ACTUAL", " = ", "[Mkmunpf]?V",
"Argon V Int", "AP\\_AR\\_V\\_INT", " = ", "[Mkmunpf]?V",
"Argon Gas Flow is", "AP\\_AR\\_GAS\\_FLOW\\_ACTUAL", " = ", "%",
"Argon Gas Flow", "AP\\_AR\\_GAS\\_FLOW", " = ", "%",
"Argon Objective is", "AP\\_AR\\_OBJECTIVE\\_ACTUAL", " = ", "[Mkmunpf]?V",
"Argon Objective", "AP\\_AR\\_OBJECTIVE", " = ", "[Mkmunpf]?V",
"Argon Condenser is", "AP\\_AR\\_CONDENSER\\_ACTUAL", " = ", "[Mkmunpf]?V",
"Argon Condenser", "AP\\_AR\\_CONDENSER", " = ", "[Mkmunpf]?V",
"Argon Discharge I is", "AP\\_AR\\_DISCHARGE\\_CURRENT", " = ", "[kmunpf]?A",
"Argon Discharge is", "AP\\_AR\\_DISCHARGE\\_ACTUAL", " = ", "[Mkmunpf]?V",
"Argon Discharge", "AP\\_AR\\_DISCHARGE", " = ", "[kmunpf]?A",
"Argon Energy is", "AP\\_AR\\_ACC\\_ACTUAL", " = ", "[Mkmunpf]?V",
"Argon Energy", "AP\\_AR\\_ACC", " = ", "[Mkmunpf]?V",
"Argon Magnification", "AP\\_AR\\_MAG", " = ", "X",
"Argon Beam Shift Y", "AP\\_AR\\_BEAM\\_SHIFT\\_Y", " = ", "[cmunpf]?m",
"Argon Beam Shift X", "AP\\_AR\\_BEAM\\_SHIFT\\_X", " = ", "[cmunpf]?m",
"Argon Shift Ratio Y", "AP\\_AR\\_SHIFT\\_RATIO\\_Y", " = ", "",
"Argon Shift Ratio X", "AP\\_AR\\_SHIFT\\_RATIO\\_X", " = ", "",
"Argon XY Ratio", "AP\\_AR\\_XY\\_RATIO", " = ", "",
"Argon Mag Factor", "AP\\_AR\\_MAG\\_FACTOR", " = ", "[cmunpf]?m",
"Argon Pixel Size", "AP\\_AR\\_PIXEL\\_SIZE", " = ", "[cmunpf]?m",
"Argon Column Angle", "AP\\_AR\\_ANGLE", " = ", "",
"Argon Acc I is", "AP\\_AR\\_ACC\\_I", " = ", "[kmunpf]?A",
"Argon Extractor is", "AP\\_AR\\_EXTRACTOR\\_ACTUAL", " = ", "[Mkmunpf]?V",
"Argon Extractor", "AP\\_AR\\_EXTRACTOR", " = ", "[Mkmunpf]?V",
"Argon Mill Progress", "AP\\_AR\\_MILL\\_PROGRESS", " = ", "%",
"Align 1 Y", "AP\\_ALIGN1\\_Y", " = ", "%",
"Align 1 X", "AP\\_ALIGN1\\_X", " = ", "%",
"CC Pressure", "AP\\_CC\\_PRESSURE", " = ", "%",
"Pirani Pressure", "AP\\_PIRANI\\_PRESSURE", " = ", "mbar|Torr",
"Back Grid", "AP\\_JAZZ\\_BACK\\_GRID", " = ", "[Mkmunpf]?V",
"Front Grid", "AP\\_JAZZ\\_FRONT\\_GRID", " = ", "[Mkmunpf]?V",
"Beam I Monitor", "AP\\_BEAM\\_CURRENT\\_MONITOR", " = ", "[kmunpf]?A",
"Stage Bias Volts", "AP\\_STAGE\\_BIAS\\_VOLTAGE", " = ", "[Mkmunpf]?V",
"Probe Cal Factor", "AP\\_POLARIS\\_PROBE\\_CAL", " = ", "",
"FIB Scan Size", "AP\\_FIB\\_SCAN\\_SIZE", " = ", "[cmunpf]?m",
"FIB Abs Beam Shift Y", "AP\\_FIB\\_ABS\\_DELTA\\_BEAM\\_SHIFT\\_Y", " = ", "[cmunpf]?m",
"FIB Abs Beam Shift X", "AP\\_FIB\\_ABS\\_DELTA\\_BEAM\\_SHIFT\\_X", " = ", "[cmunpf]?m",
"Piezo Goto Y", "AP\\_PIEZO\\_GOTO\\_Y", " = ", "[cmunpf]?m",
"Piezo Goto X", "AP\\_PIEZO\\_GOTO\\_X", " = ", "[cmunpf]?m",
"InlensDuo Grid is", "AP\\_INLENS\\_DUO\\_GRID\\_ACTUAL", " = ", "[Mkmunpf]?V",
"InlensDuo Grid", "AP\\_INLENS\\_DUO\\_GRID", " = ", "[Mkmunpf]?V",
"Contrast D", "AP\\_CONTRASTZ3", " = ", "%",
"Contrast C", "AP\\_CONTRASTZ2", " = ", "%",
"Brightness D", "AP\\_BRIGHTNESSZ3", " = ", "%",
"Brightness C", "AP\\_BRIGHTNESSZ2", " = ", "%",
"FIB Column Pressure", "AP\\_FIB\\_COLUMN\\_PRESSURE", " = ", "mbar|Torr",
"Stage at Z", "AP\\_STAGE\\_AT\\_Z", " = ", "[cmunpf]?m",
"Stage at Y", "AP\\_STAGE\\_AT\\_Y", " = ", "[cmunpf]?m",
"Stage at X", "AP\\_STAGE\\_AT\\_X", " = ", "[cmunpf]?m",
"Sample at Y", "AP\\_SAMPLE\\_AT\\_Y", " = ", "",
"Sample at X", "AP\\_SAMPLE\\_AT\\_X", " = ", "",
"Stage at T", "AP\\_STAGE\\_AT\\_T", " = ", "",
"Stage at R", "AP\\_STAGE\\_AT\\_R", " = ", "",
"Fil I", "AP\\_ACTUALCURRENT", " = ", "[kmunpf]?A",
"EHT", "AP\\_ACTUALKV", " = ", "[Mkmun]?V",
"Stage at M", "AP\\_STAGE\\_AT\\_M", " = ", "[cmunpf]?m",
"Date", "AP\\_DATE", " :", "",
"Time", "AP\\_TIME", " :", "",
"Sample ID", "SV\\_SAMPLE\\_ID", " = ", "",
"Images", "SV\\_IMAGE\\_PATH", " = ", "",
"Version", "SV\\_VERSION", " = ", "",
"Serial No.", "SV\\_SERIAL\\_NUMBER", " = ", "",
"User Text", "SV\\_USER\\_TEXT", " = ", "",
"Operator", "SV\\_OPERATOR", " = ", "",
"User Name", "SV\\_USER\\_NAME", " = ", "",
"File Name", "SV\\_FILE\\_NAME", " = ", ""),
ncol = 4, byrow = T))
names(tags.df) <-
c("sampleid",
"param.name",
"param.regexp",
"splitchar",
"unit.regexp")
tags.df$string <- ""
tags.df$value <- ""
tags.df$unit <- ""
for (i in 1:dim(tags.df)[1]) {
current.tag <- which(regexpr(tags.df$param.regexp[i], tifftags) == 1) + 1
# LEO1550 has a much smaller set of tags than Merlin, so when processing LEO1550 TIFF files,
# non-existent tags will cause current.tag == numeric(0)
if (length(current.tag) > 0) {
current.tag.value <-
strsplit(tifftags[current.tag], split = tags.df$splitchar[i])[[1]][2]
# assign tag value to tags.df$string
tags.df$string[i] <-
# remove leading spaces
sub("^\\s+", "",
# collapse multiple spaces
sub("\\s+", " ", current.tag.value),
useBytes = T)
# if current tag has purely numeric string, copy to value
if (!is.na(as.numeric(tags.df$string[i]))) {
tags.df$value[i] <-
tags.df$string[i]
}
# if current tag has non-empty df.tags$unit.regexp[i]
if (tags.df$unit.regexp[i] != "") {
# copy the unit matched by unit.regexp to tags.df$unit[i]
tags.df$unit[i] <-
substr(tags.df$string[i],
regexpr(tags.df$unit.regexp[i], tags.df$string[i]),
regexpr(tags.df$unit.regexp[i], tags.df$string[i]) +
attr(regexpr(tags.df$unit.regexp[i], tags.df$string[i]), "match.length"))
# only copy quantity if string is also non-empty
if (tags.df$string[i] != "") {
tags.df$value[i] <-
# remove trailing spaces
sub("\\s+$", "",
# remove unit
sub(tags.df$unit.regexp[i], "", tags.df$string[i]))
}
}
# Handle the magnification field (needs special treatment)
if (tags.df$unit[i] == "K X") {
tags.df$value[i] <-
# multiply by 1000 (due to "K X" unit)
1e3 * as.numeric(tags.df$value[i])
}
if (tags.df$unit[i] == " X") {
tags.df$value[i] <-
as.numeric(tags.df$value[i])
}
}
}
tags <-
data.frame(stringsAsFactors = FALSE,
sampleid = tags.df$sampleid,
parameter = tags.df$param.name,
string = tags.df$string,
value = as.numeric(tags.df$value),
unit = tags.df$unit)
return(tags)
}
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