drdeepakrajput
drdeepakrajput
/ Tool_Maintenance_Data.csv
Created
May 6, 2026 22:56
Tool Maintenance Data for Training
This file contains hidden or bidirectional Unicode text that may be interpreted or compiled differently than what appears below. To review, open the file in an editor that reveals hidden Unicode characters.
Learn more about bidirectional Unicode characters
| Tool | Date | Description | |
|---|---|---|---|
| Tool_18 | 2026-03-03 | Inspected and replaced faulty MFCs to ensure accurate gas flow. | |
| Tool_22 | 2025-10-01 | Replaced gas delivery lines and verified purge cycles. | |
| Tool_17 | 2025-10-28 | Checked endpoint detection system and recalibrated sensors. | |
| Tool_18 | 2025-10-16 | Checked and replaced throttle valve actuator. | |
| Tool_5 | 2026-04-20 | Checked and replaced throttle valve actuator. | |
| Tool_25 | 2026-03-05 | Inspected and replaced faulty MFCs to ensure accurate gas flow. | |
| Tool_18 | 2025-10-18 | Replaced RF match box and tuned impedance settings. | |
| Tool_22 | 2025-07-16 | Replaced chamber window and verified optical clarity. | |
| Tool_6 | 2025-12-12 | Verified chamber pressure control and replaced faulty valves. |